The chemical combination effects on the AIKLL Auger N′(E) peak from the oxide vs the metal results in an artifact in the profile contour region representative of the oxide-metal interface. The cause of the artifact is related to the nature of derivative recording of Auger spectra and the influence of peak shape changes because of a changing chemical environment. The artifact results in the misleading interpretation of a depletion of Al at the interface. To avoid this problem the N′(E) spectrum is integrated and N(E) peak heights are used to construct the profile.
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References
1.
HarrisL. A., J. Appl. Phys.39, 1419 (1968).
2.
TaylorN. J., Rev. Sci. Instr.40, 792 (1969).
3.
PalmbergP. W.ReachR. E.WeberR. E., and MacDonaldN. C., Handbook of Auger Electron Spectroscopy, (Physical Electronics Industries, Inc., Edina, Minn., 1972), p. 5.
4.
MularieW. M. and RushT. W., Surf. Sci.19, 469 (1970).
5.
ScheibnerE. J. and TharpL. N., Surf. Sci.8, 247 (1968).
6.
SimmonsG. W., J. Colloid Interface Sci.34, 343 (1970).
7.
JenkinsL. H. and ChungM. F., Surf. Sci.28, 409 (1971).
8.
JanssenA. P.SchoonmakerR. C.ChambersA., and PruttonM., Surf. Sci.45, 45 (1974).
9.
GrantJ. T.HaasT. W., and HoustonJ. E., Phys. Letters45 A, 309 (1973).
10.
SolomonJ. S. and BaunW. L., J. Vac. Sci. Technol.12, 375 (1975).
11.
GrantJ. T.HaasT. W., and HoustonJ. E., J. Vac. Sci. Technol.11, 227 (1974).
