Quantitative measurements of concentrations are given for the phases present in undoped tantalum thin films by the use of energy-dispersive x-ray detectors. This diffraction method can also yield the extent of preferred orientation.
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5.
CullityB. D., Elements of X-ray Diffraction (Addison-Wesley Publishing Co., Reading, Mass., 1956), p. 288 or SchulzL. G., J. Appl. Phys., 20, 1030 (1949).
