Spectroscopic Characterization of Two Different Microwave (2.45 GHz) Induced Argon Plasmas at Atmospheric Pressure

Abstract

A surface-wave-sustained discharge created by using a surfatron device in a tube open to the atmosphere can be used to maintain a microwave (2.45 GHz) plasma at atmospheric pressure at powers of less than 300 W. The TIA (Torche à Injection Axiale) is a device also producing a plasma that, moreover, permits us to work at high power (higher than 200 W and up to 1000 W). A study of the departure from the thermodynamic equilibrium existing in the argon plasmas created by both devices has been done by using optical emission spectroscopy techniques in order to characterize them and to evaluate their possible advantages when they are used for applied purposes.

Keywords

Microwave-induced plasmas Plasma diagnosis Plasma torches Plasma spectroscopy

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