Abstract
Low frequency sound and vibration affects the performance and use of electron microscopes, by disturbing the stability and resolution of the specimen's video image. A transmission electron microscope (TEM) addition was proposed to an existing research suite that had three scanning electron microscopes (SEM). The TEM, which is very heavy, rather tall and has a high center of gravity, is very sensitive to floor vibrations. This case study presents sources of disturbing vibration with spectrum measurements. The designs of the microscope room and an actively damped, pneumatic vibration isolation system are discussed. Post-installation vibration measurement results to validate performance are presented in spectral analysis charts versus criteria. Drawings and photographs illustrate the installation.