CampbellS.A., The Science and Engineering of Microelectronic Fabrication, 2nd Edn.Oxford University Press, Ch. 19 (2001).
2.
Tunable Cavity Resonator, and Method of Fabricating Same. International Patent Application, Internat. Public. Number WO 03/077385A1 (2002).
3.
WinchesterK.SpaargarenS.M.R.DellJ.M., “Tunable Fabry-Perot Cavities”, Micromachining and Fabrication, Proc. SPIEVol. 4230, pp. 198–209 (2000).
4.
WinchesterK.SpaargarenS.M.R.DellJ.M., “Transferable Silicon Nitride Microcavities”, Device and Process Technologies for MEMS and Microelectronics, SPIE Vol. 3892, pp.142–151 (1999).
5.
AntoszewskiJ.DellJ.ShivakumarT.MartyniukM.WinchesterK.WehnerJ.MuscaC.FaroneL., “Towards MEMS based infrared tuneable micro-spectrometers”, Smart Structures, Devices and Systems, Proc. SPIE Vol. 4935, pp. 148–155 (2002).
6.
KeränenaK.BlombergM.TenhunenaJ.KariojacP., “Analytic and Raytrace Modeling of a Miniaturized Infrared Spectrometer Module”, Proc. of the 2000 Int. Conf. on Modeling and Simulation of Microsystems, Chap. 16, pp. 660–663 (2000).
CarranoJ., “Tuning into Detection”, oemagazine, SPIEVol. 4, No. 4, pp. 20–22 (April 2004).
10.
BartonF.E.IIHimmelsbachD.S.de HasethJ.A.WindhamW.R.SmithW.H., “The Use of Interferometers and Imaging Spectrometers for Agricultural Applications”, ANISG 2004, Fremantle, WA, p. 1 (2004).