Abstract
The creeping discharge (CD), a special kind of surface discharge, is proposed as a method of ionization in mass spectrometry for elemental analysis of dielectrics. Characteristic features of creeping discharge ionization mass spectra of dielectric samples were studied. An yttrium oxide standard sample and dielectrics of high electric strength were successfully analyzed. The results of analysis of the ion charge state in creeping discharge are presented. A theoretical model of creeping discharge ionization is offered.
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