We have made a study of the total ionization cross-sections of a silane (SiH4) molecule caused by electron impact for a single ionization. Electron-impact ionization cross-sections (EIICS) have been calculated from threshold ionization energy to 1400 eV. The theoretical model, developed by Jain and Khare, has been used to calculate the EIICS for silane. We observed the following product ions: SiH3+, SiH2+, SiH+, Si+, H2+ and H+. The predicted EIICS of silane for all six fragment ions are compared with other theoretical and experimental data. The present model shows a good agreement with the previously reported data.
Kac-NuneP.PerrinJ.GuillonJ.JollyJ., “Mass spectrometry detection of radicals in SiH4–CH4–H2 glow discharge plasmas”, Plasma Sources Sci. Technol.4, 250 (1995). doi: http://dx.doi.org/10.1088/0963-0252/4/2/009
2.
KametaK.UkaiM.ChibaR.NaganoK.KouchiN.HatanoY.TanaakaK., “Absolute measurements of photoabsorption and photoionization cross sections of disilane in the 13–40 eV region”, J. Chem. Phys.95, 6188 (1991). doi: http://dx.doi.org/10.1063/1.461593
3.
BerkovitzJ.GreeneJ.P.ChoH., “Photoionization mass spectrometric studies of SiHn (n = 1–4)”, J. Chem. Phys.86, 1235 (1987). doi: http://dx.doi.org/10.1063/1.452213
4.
JohnsonR.D.IIITsaiB.P.HudgensJ.W., “Multiphoton ionization of SiH3 and SiD3 radicals: Electronic spectra, vibrational analyses of the ground and Rydberg states, and ionization potentials”, J. Chem. Phys.91, 3340 (1989). doi: http://dx.doi.org/10.1063/1.456909
5.
ChathamH.HilsD.RobertsonR.GallagherA., “Total and partial electron collisional ionization cross sections for CH4, C2H6, SiH4, and Si2H6”, J. Chem. Phys.81, 1770 (1984). doi: http://dx.doi.org/10.1063/1.447848
6.
KrishnakumarE.SrivastavaS.K., “Ionization cross sections of silane and disilane by electron impact”, Contrib. Plasma Phys.35, 395 (1995). doi: http://dx.doi.org/10.1002/ctpp.2150350407
7.
BasnerR.SchmidtM.TarnovskyV.BeckerK.DeutschH., “Dissociative ionization of silane by electron impact”, Int. J. Mass Spectrom. Ion Processes171, 83 (1997). doi: http://dx.doi.org/10.1016/S0168-1176(97)00063-3
KhareS.P., “Energy spectrum of the secondary electrons and the fluorescent efficiency of electrons in the 3914-Å band”, Planet. Space Sci.17, 1257 (1969). doi: http://dx.doi.org/10.1016/0032-0633(69)90016-6
12.
KhareS.P.MeathW.J., “Cross sections for the direct and dissociative ionisation of NH3, H2O and H2S by electron impact”, J. Phys. B20, 2101 (1987). doi: http://dx.doi.org/10.1088/0022-3700/20/9/021
13.
BhattP.PalS., “Electron impact ionization cross-sections for the N2 and O2 molecules”, J. Electron Spectrom. Related Phenom.129, 35 (2003). doi: http://dx.doi.org/10.1016/S0368-2048(03)00033-1
PalS., “Determination of angular cross sections for electron dissociative ionization of the CCl4 molecule”, J. Phys. Conf. Ser.163, 012030 (2009) doi: http://dx.doi.org/10.1088/1742-6596/163/1/012030.
ShynT.W.SharpW.E., “Doubly differential cross section of secondary electrons ejected from gases by electron impact: 50–400 eV on CO2”, Phys. Rev. A20, 2332 (1979). doi: http://dx.doi.org/10.1103/PhysRevA.20.2332
18.
LassettreE. N.SkerbeleA.MichaelA.D., “Electron-impact spectrum of ethane”, J. Chem. Phys.46, 4536 (1967). doi: http://dx.doi.org/10.1063/1.1840585
