The principle of a high-precision optical profilometer for the examination of micro-geometrical surface defects without material contact between the sensor and the surface is explained and the prototype is described.
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References
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DupuyO. Thesis published in the Revue d'Optique 1964 43 (Nos 5 and 6) and summarized in the GAMI J. 1964 (No. 3, May-June).
