The present article discusses the theoretical basis of generating stepping motion in microsystems. The fundamental principle is to generate asymmetry in friction force in forward and backward motions of a rigid slider by modulating the normal and tangential force. Three architecturally different mechanisms, namely directly driven embedded oscillator, slider on vibrating surface, and slider with embedded oscillator on vibrating surface models, are considered. Simple mathematical models and analytical methods for studying the dynamic characteristics of the systems are developed. Different types of systems are analysed using a unified approach. Dynamic simulation of MATLAB SIMULINK models confirms analytical results.
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