In this study, a novel inertial piezoelectric rotary motor is proposed and its operating principle is introduced. The dynamics model of the motor is presented. From the model, the equations of the natural frequency and mode function of the motor are obtained. Using these equations, the natural frequency and mode function of the motor are investigated and chosen. A model machine of the motor is made and the operating test of the motor is done. The test results illustrate the working principle of the motor and analytical calculations. The motor structure is quite simple and is favourable to further miniaturize the piezoelectric rotational motor.
SashidaT.KinjoT., An introduction to ultrasonic motors (Oxford: Clarendon Press1993).
2.
UehaS.TomikawaY.KurosawaM.NakamuraN., Ultrasonic motors: Theory and Applications (Oxford: Clarendon Press1993).
3.
NakamuraK.UheaS., ‘Potential ability of ultrasonic motors: A discussion focused on the friction control mechanism’Electron. Commun. Jpn.281 (1998): 57–68.
HidekiK.YasuoH.HitoshiK.ToshiroH., ‘Positioning and measurement using a crystalline lattice reference scale – a feasibility study of STM application to MEMS’ In Proceedings of the IEEE Micro Electro Mechanical Systems – An Investigation of Micro Structures, Sensors, Actuators, Machines, Napa Valley, California, USA, 1990, pp. 197–202.
6.
HidekiK.YasuoH.HitoshiK.ToshiroH., ‘Crystalline lattice for metrology and positioning control’ In Proceedings of the IEEE Micro Electro Mechanical Systems, Nara, Japan, 1991, pp. 239–244.
7.
BerganderA.BreguetJ. M.SchmittC.ClavelR., ‘Micropositioners for microscopy applications based on the stick-slip effect’ In Proceedings of the International Symposium on Micro machine and human science, USA, 2000, pp. 213–216.
8.
BreguetJ. M.ClavelR., ‘Stick and slip actuators: Design, control, performances and applications’ In Proceedings of the International Symposium on Micromechatronics and human science, Nagoya, Japan, 1998, pp. 89–95.
9.
YoshidaR.OkamotoY.OkadaH., ‘Development of smooth impact drive mechanism (2nd report) – optimization of waveform of driving voltage (development of smooth impact drive mechanism (2nd report) – optimization of waveform of driving voltage)’Seimitsu Kogaku Kaishi/J. Jpn. Soc. Precis. Eng.68 (2002): 536–540.
10.
SuzukiY.TaniK., ‘and Sakuhara, T. Development of a new type piezoelectric micromotor’Sens. Actuators A, Phys.83 (2000): 244–248.
11.
BoumousZ.BelkhiatS.KebbabF. Z., ‘Effect of shearing deformation on the transient response of a traveling wave ultrasonic motor’Sens. Actuators A, Phys.150 (2009): 243–250.
12.
SimoneP.RosarioS.AlbertoM., ‘Evaluation of the effect of preload force on resonance frequencies for a traveling wave ultrasonic motor’IEEE Trans. Ultrason. Ferroelectr. Freq. Control53 (2006): 746–752.
