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Abstract

In this article, the non-linear electromechanical coupled dynamic equation of the micro-plate subjected to an electrostatic force is presented. The non-linear free vibration of the electromechanical coupled micro-plate system and the non-linear forced response of the system to voltage excitation are investigated. Non-linear vibration frequencies of the micro-plate for every mode are calculated and compared with the linear natural frequencies. Changes in the non-linear frequencies with the system parameters are presented. The non-linear vibration displacements of the micro-plate at some typical cross-section are calculated for the first three modes. Effects of the system parameters on the displacements are analysed. The changes in the vibration amplitudes with respect to the exciting frequency under different modes and parameters are investigated. Moreover, the effects of the boundary conditions on the electromechanical coupled micro-plate system are also investigated.

Keywords

non-linear vibration micro-plate microelectromechanical system free vibration forced response

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Electromechanical coupled non-linear vibration of the microplate

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