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Abstract

In this work, a novel type of dual-servo stage system is proposed in order to achieve accurate position control. A bidirectional electrorheological fluid clutch is adopted for a coarse-positioning stage, and a multi-stack piezoceramic actuator associated with a displacement amplifier for a fine-positioning stage. After deriving the dynamic model of the coarse-motion stage, a sliding-mode controller associated with a friction compensator is formulated to achieve robust position control performance. In addition, a model-based feedforward compensator incorporating a conventional proportional-integral-derivative controller is designed to compensate the hysteresis non-linearity of the fine-positioning stage. These controllers are experimentally realized in a decentralized strategy and control responses such as step input response are evaluated to verify the effectiveness of the proposed dual-servo positioning system.

Keywords

dual-servo stage electrorheological (ER) clutch piezoactuator sliding-mode controller hysteresis compensator

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References

Omari

Ming

Nakamura

Kanamori

Development of a high precision mounting robot with fine motion mechanism (2nd report)control of the fine mechanism considering dynamic response and disturbance from coarse mechanism. J. Japan Soc. Precision Engrs, 2000, 66 (1), 1583–1589.

Lee

C. W.

Kim

S. W.

An ultraprecision stage for alignment of wafers in advanced microlithography. Precision Engng, 1997, 21, 113–122.

Moriyama

Harada

Takanashi

Precision X-Y stage with piezo-driven fine table. Bull. Japan Soc. Precision Engng, 1998, 22 (1), 13–17.

Sakuta

Ogawa

Ueda

Experimental studies on ultra-precision positioning. Int. J. Japan Soc. Precision Engng, 1993, 27 (3), 235–240.

Sakaguchi

Zhang

Furusho

Modeling and motion control of an actuator unit using ER clutches. In Proceedings of the 2000 IEEE International Conference on Robotics and Automation, San Francisco, California, 2000, pp. 1347–1353 (IEEE, New York).

Saito

Sugimoto

A study on electro-rheological motion control using an antagonistic rotary actuator. In Proceedings of the International Conference on Electro-rheological Fluids, 1997, pp. 54–65.

Han

S. S.

Choi

S. B.

Cheong

C. C.

Position control of X-Y table mechanism using electro-rheological clutches. Mech. Mach. Theory, 2000, 35, 1563–1577.

Han

S. S.

Precision positioning control of smart dual-servo stage featuring piezostack actuator and ER clutch. PhD dissertation, Inha University, Incheon, Korea, 2003.

Park

D. W.

Choi

S. B.

Moving sliding surfaces for high-order variable structure systems. Int. J. Control, 1999, 72 (11), 960–970.

10.

Slotine

J. J.

Applied Nonlinear Control, 1991 (Prentice-Hall, Englewood Cliffs, New Jersey).

11.

Chen

C. T.

Linear System Theory and Design, 1999 (Oxford University Press, Oxford).

12.

Jouaneh

Generalized Praisach model for hysteresis nonlinearity of piezoceramic actuators. Precision Engng, 1997, 20, 99–111.

13.

Han

Y. M.

Lim

S. C.

Lee

H. G.

Choi

S. B.

Choi

H. J.

Hysteresis identification of polymethylaniline-based ER fluid using Preisach model. Mater. Des., 2003, 24 (1), 53–61.

14.

Doong

Mayergoyz

On numerical implementation of hysteresis model. IEEE Trans. Magnetics, 1985, 21, 1853–1855.

Position control of a dual-servo stage featuring an electrorheological fluid clutch and piezostack actuator

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