Most shaping processes for ceramics are based on a powder technological moulding process using a negative mould and subsequent thermal compaction. Especially for prototypes and small-lot series of microcomponents, the outlay for moulds is the major costing factor. Therefore the use of rapid prototyping (RP) processes can decisively reduce the costs and time in product development of ceramic microcomponents. By combining the high resolution of, for example, stereolithography as an inexpensive and fast supply for master models with the high flexibility of low-pressure injection moulding, a rapid prototyping process chain (RPPC) has been established for the fabrication of micropatterned ceramic components as functional models or pre-production lots. This RPPC proved to have a very high moulding precision and accuracy in the submillimetre range, but also enables the fabrication of components with outer dimensions of several centimetres. Different RP techniques were investigated with regard to their suitability to be used as master models in the replication chain. The quality of the master models turned out to be of decisive significance for the quality and reproducibility of the ceramic mouldings.
HullC.Apparatus for production of three-dimensional objects by stereolithography. US Pat. 4,575,330, 1986.
2.
ReinhardtA.GötzenR.Microsystems production with rapid micro product development (RMPD). In Conference Proceedings, TCT′99, Nottingham, 12-13 October 1999, 123 pp.
3.
BertschA.BernhardP.VogtC.RenaudP.Rapid prototyping of small size objects. Rapid Prototyping J., 2000, 6 (4), 259–266.
4.
VaradanV. K.JiangX.VaradanV. V.Microstereolithography and Other Fabrication Techniques for 3D MEMS, 2001 (John Wiley, Chichester, West Sussex).
ZhangX.JiangX. N.SunC.Micro-stereolithography of polymeric and ceramic microstructures. Sensors and Actuators, 1999, 77, 149–156.
14.
ProvinC.MonneretS.Le GallH.RigneaultH.New process for manufacturing microfluidic devices for microreactor and bioanalytical applications. In 5th International Conference on Microreaction Technology (IMRET 5), Strasbourg, France, 27-30 May 2001, Book of Abstracts, pp. 133–135.
15.
DufaudO.CorbelS.Stereolithography of PZT ceramic suspensions. In Proceedings of Euro RP 2001, Paris, France, 7-8 June 2001.
16.
JanasV. F.SafariA.Overview of fine-scale piezo-electric/polymer composite processing. J. Am. Ceram. Soc., 1995, 78 (11), 2945–2955.
17.
BastU.CramerD.WolffA.A new technique for the production of piezoelectric composites with 1-3 connectivity. In World Ceramics Congress (7th CIMTEC), Montecatini, Italy, 1990, Ceramics Today—Tomorrow's Ceramics (Ed. VincenziniP.), Vol. 66C, 1991, pp. 2005–2015 (Elsevier Science, Amsterdam, The Netherlands).
18.
NökerF.BeyerE.Herstellung von Mikrostrukturkörpern aus Keramik. Keramische Z., 1992, 44 (10), 677–681.
BauerW.Ritzhaupt-KleisslH.-J.HaußeltJ.Shaping of high aspect ratio ceramics by centrifugal casting. In Proceedings of the International Conference and Exhibition on Micro Materials (Micro Mat 1997) (Eds MichelB.WinklerT.), Dresden, Germany, 16-18 April 1997, pp. 1227–1229.
21.
PiotterV.BenzlerT.RuprechtR.HaußeltJ.Manufacturing of micro sized structures by MIM and CIM. In Proceedings of the International Conference on Powder Metallurgy and Particulate Materials (PM 2 TEC′98), Las Vegas, Nevada, 31 May-4 June 1998, Advances in Powder Metallurgy and Particulate Materials, Vol. 2, Part 5, pp. 161–169 (Metal Powder Industries Federation (MPIF), Princeton, New Jersey).
22.
BauerW.Ritzhaupt-KleisslH.-J.HaußeltJ.Micropatterning of ceramics by slip pressing. Ceram. Int., 1999, 25, 201–205.
PiotterV.BauerW.BenzlerT.EmdeA.Injection molding of components for microsystems. Microsystem Technologies, 2001, 7 (3), 99–102.
25.
KnitterR.BauerW.Linner-KrcmarB.HansjostenE.Rapid manufacturing of ceramic microcomponents. In EUROMAT 99 on Ceramics—Processing, Reliability, Tribology and Wear (Ed. MüllerG.), München, Germany, 27-30 September 1999, Vol. 12, 2000, pp. 75–80 (Wiley-VCH, Weinheim, Germany).
26.
KnitterR.BauerW.GöhringD.HaußeltJ.Manufacturing of ceramic microcomponents by a rapid prototyping process chain. Advd Engng Mater., 2001, 3 (1-2), 49–54.
27.
BauerW.KnitterR.Development of a rapid prototyping process chain for the production of ceramic microcomponents. J. Mater. Sci., 2002, 37, 3127–3140.
28.
KnitterR.GöhringD.RisthausP.HaußeltJ.Microfabrication of ceramic microreactors. Microsystem Technologies, 2001, 7 (3), 85–90.
29.
KnitterR.BauerW.GöhringD.RisthausP.RP process chains for ceramic microcomponents. Rapid Prototyping J., 2002, 8 (2), 76–82.
PeltsmanI.PeltsmanM.Process, machinery, and tooling for hot molding of ceramics under low pressure. Ceram. Engng Sci. Proc., 1981, 2 (9-10), 1006–1010.
32.
PeltsmanI.PeltsmanM.Improvements in machinery for hot-molding of ceramics under low-pressure. Ceram. Engng Sci. Proc., 1982, 3 (10-12), 865–868.
33.
LenkR.Hot moulding—an interesting forming process (HeiBgießen—ein interessantes Formgebungsverfahren). Ber. der Deutschen Keramischen Ges., 1995, 72 (10), 636–642.
CorbettW. J.SchafferP. T. B.Injection molding of advanced ceramics. In 19th International SAMPE Technical Conference, Crystal City, Virginia, 13-15 October 1987 (Ed. LynchT.), pp. 545–553 (SAMPE).
36.
RisthausP.GöhringD.KnitterR.A rapid prototyping process chain for ceramic microcomponents. In 7th Conference of the European Ceramic Society, Brugge, Belgium, 9-13 September 2001, Euro Ceramics VII, Part 1, Key Engineering Materials (Eds ArmaniosE.MaiY.-W.NewazG. M.WöhlbierF. H.), Vol. 206-213, 2002, pp. 337–340 (Trans Tech Publications, Switzerland).
37.
JudsonE. A.StarrT. L.Dimensional accuracy in rapid prototyping of ceramics formed by injection molding using rapid tooling. In 101st Annual Meeting of the American Ceramic Society, Indianapolis, Indiana, 25-28 April 1999, Innovative Processing and Synthesis of Ceramics, Glasses and Composites III (Eds SinghJ. P.BansalN. P.NiiharaK.), 1999, Ceramic Transactions 108, pp. 341–350 (American Ceramic Society, Westerville, Ohio).
38.
BauerW.KnitterR.BarteltG.GöhringD.HansjostenE.Replication techniques for ceramic micro-components with high aspect ratios. In 4th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 01), Baden-Baden, Germany, 17-19 June 2001, Book of Abstracts, pp. 145–146.
39.
CawleyJ. D.Solid freeform fabrication of ceramics. Current Opinion in Solid State and Mater. Sci., 1999, 4, 483–489.
