The paper considers the measurement of Young's modulus and internal stress in micro-engineered bridge structures. Values determined from the results of static tests, obtained from the measurement of compliance using a nanoindenter, are compared with values derived from natural frequency measurements obtained from dynamic testing using a laser vibrometer. Both test procedures use mathematical models ‘fitted’ to experimental data to estimate Young's modulus and internal stress. For the case of boron-doped silicon bridges the dynamic test method is shown to produce the superior estimates.
BourouinaT.VaugeC.HekkiH.Variational method for tensile stress evaluation and application to heavily boron-doped square shaped diaphragms. Sensors and Actuators A, June 1995, 49(1-2), 21–27.
2.
DingX.KoW. H.MansourJ. M.Residual stress and mechanical properties of boron-doped p** plus-silicon films. Sensors and Actuators A, April 1990, 23(1-3), 866–871.
3.
BurdessJ. S.HarrisA. J.CruickshankJ. J.WoodD.CooperG.Silicon membrane gyroscope with electrostatic actuation and sensing. In Micromechanical and Microfabrication Process Technology, Proceedings of the SPIE, Vol. 2642, 1995, pp. 74–83 (SPIE, Bellingham, Washington).
4.
BurdessJ. S.HarrisA. J.WoodD.PitcherR. J.GlennieD.A system for the mechanical characterisation of microstructures. J. Microelectromech. Systems, December 1997, 6(4).
5.
PageT. F.OliverW. C.McHargueC. J.The deformation behaviour of ceramic crystals subjected to very low load (nano) indentations. J. Mater. Res., February 1992, 7(2), 450–473.
6.
WeighsT. P.HongS.BravmanJ. C.NixW. D.Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films. J. Mater. Res., September-October 1988, 3(5), 931–942.
7.
ZhangL. M.UttamchandiD.CulshawB.Measurement of the mechanical properties of silicon microresonators. Sensors and Actuators A, 1991, 29, 79–84.
8.
ZookJ. D.BurnsD. W.GuckelH.SniegowskiJ. J.EngelstadR. L.FengZ.Characteristics of polysilicon resonant microbeams. Sensors and Actuators A, 1992, 35, 51–59.
9.
PemberA.SmithJ.KemhadjianH.Long term stability of silicon bridge oscillators fabricated using the boron etch stop. Sensors and Actuators A, 1995, 46-47, 51–57.
10.
RoarkR. R.Formulas for Stress and Strain (McGraw-Hill, New York).
