In this work, the vacuum-casting process is pushed to its dimensional limits thanks to microfabricated original parts. The successful replication of those parts with a slightly adapted vacuum-casting process demonstrates that this technique is suitable for biomicrosystem manufacturing and development.
GardnerJ. W.VaradanV. K.AwadelkarimO. O.Microsensors, MEMS and Smart Devices, 2001 (John Wiley: New York).
2.
VaradanV. K.JiangX.VaradanV. V.Microstereolithography and other Fabrication Techniques for 3D MEMS, 2001 (John Wiley, New York).
3.
LeeG.-B.ChenS.-H.HuangG.-R.SungW.-C.LinY.-H.Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection. Sensors Actuators B, 2001, 75, 142–148.
4.
LinL.ChengT.ChiuC. J.Comparative study of hot embossed micro structures fabricated by laboratory and commercial environments. Microsystem Technologies, 1998, 4, 113–116.
5.
ShenX.-J.PanL.-W.LinL.Microplastic embossing process experimental and theoretical characterizations. Sensors Actuators A, 2002, 97-98, 428–133.
6.
BeckerH.HeimU.Hot embossing as a method for the fabrication of high-aspect ratio structures. Sensors Actuators A, 2000, 83, 130–135.
7.
SuY.-C.ShahJ.LinL.Implementation and analysis of polymeric microstructure replication by micro-injection moulding. J. Micromech. Microengng, 2004, 14, 415–422.
8.
SenturiaS. D.Microsystem design, 2000, pp. 67–71 (Kluwer Academic Publishers: Dordrecht).
9.
DuffyD.MacDonaldJ. C.SchuellerO.White-sidesG. M.Rapid prototyping of microfluidic systems in PDMS. Anal. Chem., 1998, 70, 4974–4984.
10.
ChengY.ShewB.-Y.LinC.-Y.WeiD.-H.ChyuM. K.Ultra-deep LIGA process. J. Micromech. Microengng, 1999, 9, 58–63.
11.
KimK.ParkS.LeeJ.-B.ManoharaH.DestaY.MurphyM.AhnC. H.Rapid replication of polymeric and metallic high-aspect ratio microstructures using PDMS and LIGA technology. Microsystem Technologies, 2002, 9, 5–10.
