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Abstract

In recent years, much research has been devoted to the development of micromachining technologies for ceramic materials. This paper investigates two kinds of machining methods capable of dimpling a ceramic surface with highly controlled precision: abrasive jet machining (AJM) and laser beam machining (LBM). A comparative discussion of the geometrical and topographical characteristics of microdimples machined on to an Si₃N₄ surface is first presented, followed by the main topic, an examination of the effects of micromachining on the strength degradation of ceramics. Dimpling by LBM cannot be prevented from forming a sharp edge around the dimple bottom face, which may degrade the flexural strength of the ceramic considerably. In contrast, the AJM dimple has a smooth-faced rounded shape, and only negligible deterioration of the strength takes place.

Keywords

abrasive jet machining laser beam machining silicon nitride ceramic

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Influence of micromachining on strength degradation of silicon nitride

Abstract

Abstract

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