Analyses of laser and furnace treated sol–gel coatings

Abstract

A new method that allows thin films to be produced with almost any composition and degree of porosity by means of a combination of sol–gel and laser technology is explored. Results offurnace and laser treated TEOTi (tetraethylorthotitanate as sol precursor) coated silicon specimens are presented. From detailed X–ray analyses it appeared that the TEOTi derived sol–gel coatings experience crystallisation during furnace as well as laser treatment. The resulting TiO² is present in two different tetragonal phases. As far as the residual stress measurements on the TEOTi derived sol–gel coatingsare concerned, it can be concluded that there is no significant triaxial stress state present in the coating, which justifies the biaxial stress analysis.