Sage Journals: Discover world-class research

Abstract

Surface coating technologies now play a vital role in many engineering applications, particularly in the areas of wear resistance and corrosion protection. The use of surface coatings can allow stringent specifications to be met by otherwise routine engineering materials. Unbalanced magnetron sputtering, a development of the basic sputtering process, is a highly versatile coating process which is now used to deposit high quality metal, alloy, and ceramic coatings on to a wide range of components. This paper discusses several recent applications of materials deposited by unbalanced magnetron sputtering, including coatings for wear and corrosion resistance, novel supersaturated alloys, and multilayer coatings with pyrotechnic properties.

Get full access to this article

View all access options for this article.

References

VOSSEN

J. L.

and KERN

(eds.): ‘Thin film processes II’, 1991, London, Academic Press.

ROSSNAGEL

S. M.

and CUOMO

J. J.

: Vacuum, 1988, 38, (2), 73–81.

WINDOW

and SAVVIDES

: J. Vac. Sci. Technol. A, 1986, A4, (2), 196–201.

WINDOW

and SAVVIDES

: J. Vac. Sci. Technol. A, 1986, A4, (2), 453–456.

SAVVIDES

and WINDOW

: J. Vac. Sci. Technol. A, 1986, A4, (2), 504–508.

ITER

D. G.

: UK Patent Application 9006073, 2, 1990.

TEER

D. G.

and LAING

K. C.

: IPAT 91. Proc. 8th Int. Conf. on Ion and Plasma Assisted Techniques, Brussels, May 1991, CEP Consultants, 202.

TEER

D. G.

: ISSP ’91, Proc. 1st Int. Symp. on Sputtering and Plasma Processes, Tokyo, February 1991, ISSP Committee, 131.

KNOTEK

and LOFFLER

: ICMCTF 92, Proc. Int. Conf. on Metallurgical Coatings and Thin Films, San Diego, CA, USA, April 1992, American Vacuum Society.

10.

MONAGHAN

D. P.

, ARNELL

R. D.

, and BATES

R. I.

: Proc. 3rd Int. Conf. on Advances in Coatings and Surface Engineering for Corrosion and Wear Resistance, Newcastle upon Tyne, UK, May 1992, Newcastle Polytechnic.

11.

ALLFORD

F. G.

and PLACE

M. S.

: Proc. 15th Int. Pyrotechnics Seminar. Boulder, CO, USA, 1990, International Pyrotechnics Society, 1.

Some recent applications of materials deposited by unbalanced magnetron sputiering

Abstract

Get full access to this article

References