Boron Condensation from Glow Discharge

Abstract

The efficiency and morphology of boron deposition have been investigated in a glow discharge, using a BCl₃-H₂ mixture. The efficiency of reaction depends on the initial BCl₃ concentration and the gas flowrate. The maximum efficiency was 27% at 800° C using an initial BCl₃ concentration of between 0.2 and 10 vol. -%. Under these conditions the boron condensed on the caihode as slightly overlapping spiral crystals. The quantity of condensed boron increases linearly with higher initial BCl₃ concentration, and thus the reaction should be considered as being first order relative to the BCl₃ concentration.