Electron-probe microanalysis: Instrumental and experimental aspects

Abstract

The characteristic x-rays emitted by the elements when excited by electrons or primary X-radiation have been used in spectrochemical analysis of relatively large-area samples since the 1920's. The principal characteristic lines of the K, L, M, and N series that are of interest are shown in Fig. I; the plot includes only the main lines in each series and the spectra, though much simpler than optical spectra, become increasingly complex on passing from K to L to M, &c., (full details of the origin of the lines can be found in the book by Compton and Allison, and Sagel gives comprehensive tables of wavelengths, &c).