Methods for the in situ measurement of foil thickness in the transmission electron microscope (TEM) are reviewed for the non-specialist. The techniques described range from those based upon the analysis of crystallographic features contained in the specimen, as may be carried out with the most basic TEM configuration, to those which involve measurements of electron energy loss spectra or X-ray emission characteristics and require the addition of sophisticated analytical equipment to the electron microscope. Some methods are seen to give the foil thickness directly, while others must be regarded as being relative since they require calibration using reference foils of known thickness and composition. Factors such as the range of applicability, ease of use, and accuracy of the techniques are discussed as well as the possibility of misinterpreting the data.
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