High performance PZT thick film actuators using in plane polarisation

Abstract

Piezoceramic thick films offer the possibility of integrated functional components in planar design. They can be applied as sensors, actuators, ultrasonic transducers, transformers and generators. Typically, piezoceramic thick films are excited through the film thickness. In contrast, in-plane mode of excitation will be beneficial especially for actuator applications. The use of interdigitated electrodes (IDEs) enables in-plane excitation of piezoceramic thick films. Actuator performance of cantilever structures with through thickness and in-plane polarised piezoceramic thick films are investigated. The performance of in-plane polarised cantilevers depends on the particular IDE spacing. Using finite element simulations of the E-field distribution, geometrical and design efficiencies are considered and compared to experimentally derived data.