Structural characterisation of anodic SiO 2 thin films on n-type Si

Abstract

This article presents the results of anodic silicon dioxide (SiO₂) thin film on n-type silicon substrate. A mixture of nitric acid and deionised water has been used as the electrolyte for the anodisation process. The effects of supplied voltage and oxidation time on the structural properties of film have been investigated. It has found that thickness, refractive index, density, porosity and dielectric constant of the anodised film are depending on the investigated parameters. Defect free anodic oxide with morphology of round shape spikes has been successfully grown on the substrate.

Keywords

ANODISATION ELECTROLYTE THIN FILM

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