Relationship between composition,bonding constitution and microstructure in unbalanced magnetron sputtered Ti–B

Abstract

Two types of Ti–B–N thin films with different B contents were deposited on Si(100) at room temperature at different nitrogen flowrates. Their phase configurations and microstructures were subsequently characterised. The results indicated that the nitrogen flowrate greatly affected phase configuration and film composition. At a low nitrogen flowrate, TiN bonding was preferentially formed, accompanying with small amounts of TiB and TiB₂ bonds. Formation of TiB₂ bonding was accelerated with increasing B content. Nanocomposite thin films mainly consisting of nanocrystalline (nc-) TiN/amorphous (a-) TiB₂ were finally formed. At a high nitrogen flowrate, TiN followed by BN was first formed, accompanying with small amounts of TiB and TiB₂ bonds. Formation of BN bonding was further accelerated with increasing B content. Nanocomposite thin films mainly consisting of nc-TiN and a-BN were finally produced. The present thin films are the nanocomposite of nc-TiN embedded in the a-matrix with a dense microstructure despite of the nitrogen flowrate.

Keywords

BONDING BORON MICROSTRUCTURE NITROGEN FLOWRATE TI-B-N THIN FILMS

Get full access to this article

View all access options for this article.

References

Musil

: Surf Coat. Technot, 2000, 125, 322–330.

Vepfek

: J. Vac. Set TechnoL A, 1999, 17A, (5), 2401–2420.

Novotny

, Benesovsky

, Brukl

and Schob

: Monatsch. Chem., 1961, 92, 403–410.

Kamer

, Laimer

, Stfiri

and Rödnammer

: Surf Coat. TechnoL, 1989, 39-40, 263–300.

Selbach

, Schmidt

and Wang

: Thin Solid Films, 1990, 188, 267–274.

Baker

M. A.

, Steiner

, Haupt

and Gissler

: J. Vac. ScL TechnoL A, 1995, A13, (3), 1633–1638.

Ruby

, Ott

, Huang

, Weaver

M. L.

and Barnard

J. A.

: Surf Interface Anal., 2000, 29, 823–828.

Wiedemann

, Weihnacht

and Oettel

: Surf Coat. Technot, 1999, 116-119, 313–321.

Karvankova

, Veprek-Heijman

M. G. J.

, Zindulka

, Bergmaier

and Veprek

: Surf Coat. Technot, 2003, 163-164, 149–156.

10.

Wong

M. S.

and Lee

Y. C.

: Surf Coat. TechnoL, 1999, 120-121, 194–199.

11.

Y. H.

, Zhou

Z. F.

, Sit

, Shen

Y. G.

, Li

K. Y.

and Chen

: Surf Coat. Technol, 2004, 187, 98–105.

12.

Héau

and Terrat

J. P.

: Surf Coat. Technot, 1998, 108-109, 332–339.

13.

Shirley

D. A.

: Phys. Rev. B, 1972, 5, 4709–4714.

14.

Carrasco

C. A.

, Vergara

S. V.

, Benavente

G. R.

, Mingolo

and Rios

J. C.

: Mater. Charact., 2002, 48, 81–88.

15.

Dean

J. A.

: ‘Lang's handbook of chemistry’, 15th edn; 1999, New York, McGraw-Hill Inc.

16.

Rogl

and Schuster

J. C.

: ‘Phase diagrams of ternary boron nitride and silicon nitride systems’, Monograph Series on Alloy Phase Diagrams, 107–108; 1992, Materials Park, OH, ASM International.

Relationship between composition,bonding constitution and microstructure in unbalanced magnetron sputtered Ti–B–N thin films

Abstract

Keywords

Get full access to this article

References