Abstract
An innovative coating technology based on ion plasma magnetron sputtering physical vacuum deposition (IMPS-PVD) method has been developed to produce new complex coatings to meet the constantly growing demand of advanced industries, with a view to replacing chemical coating methods owing to their ecology danger and to complement/replace high temperature PVD methods. The high deposition rate magnetron (HDRM) technology has initiated a rebirth of mosaic targets as the key component leading to a big increase in the design accuracy of both targets and coatings to be deposited.
Get full access to this article
View all access options for this article.
References
1.
Kelly
P.
and
Arne11
R.
Vacuum , 2000 , 56 , 159 –172 .
2.
Kienel
G.
,
Meyer
B.
and
Munz
W.
Vacuumtechnik , 1981 , 30 , 236 –246 .
3.
Yang
S.
and
Teer
D.
Surf Coat. Technol ., 2000 , 131 , 412 –416 .
4.
Teer
D.
: UK Patent No. 2258343; USA Patent No. 5554519; European Patent No 0521045 .
5.
Munz
W.
and
Hessberger
G.
US Patent No. 4426267 Cl .
6.
Munz
W.
,
Hoffman
D.
and
Harting
K.
Thin Solid Films , 1982 , 96 , 79 .
7.
Raich
I. A.
,
Koltunova
L. N.
and
Fedosov
S. N.
Mashinostroenie , 1976 , 368 .
8.
Fenerstein
A.
,
Dietrch
W.
and
Stephan
H.
Vac. Tech ., 1984 , 50 , 417 –423 .
9.
Rykalin
N. N.
,
Uglov
A. A.
and
Kokora
A. N.
Mashinostroenie , 1975 , 296 .
10.
Sinev
V. P.
: Fisika i khimija obrabotki materialov , 1978 , (4 ), 136 –142 .
11.
Stephan
H.
,
Dietrich
W.
,
Fenerstein
A.
and
Hoffmann
O.
Metall , 1981 , 35 , 427 –431 .
12.
Schiller
S.
,
Heising
V.
and
Goedike
K.
Vakuum-Technik , 1978 , 21 , (1 ), 51 .
13.
Mitin
V.
et al .: Russia Patent No. 2131626 , August 1996 .
14.
Mitin
V.
el al .: Russia Patent No. 2210620 , August 2003 .