Microstructure and properties of nc-TiC/a-C∶H films deposited by radio frequency reactive sputtering

Abstract

Amorphous carbon films containing titanium carbide (nc-TiC/a-C∶H) were deposited onto n-type silicon (100) by radio frequency reactive sputtering titanium target in an Ar–CH₄ mixed atmosphere. The composition and microstructure of the films were characterised by means of X-ray photoelectron spectroscopy, field emitted SEM, XRD and Raman spectra. The mechanical and tribological properties of the films were measured by a nanoindentation tester and a ball-on-disc UMT–2MT tribometer. By adjusting the CH₄ flowrate, Ti content in the films could be controlled, and a transition in structures of the films from loose polymer-like to glassy and dense nanostructure was observed. The density of coatings was improved by the introduction of TiC nanocrystalline particles. The mechanical and lubricious properties were different accordingly.