Abstract
The factors which determine the angular resolution in electron backscatter diffraction (EBSD), and the operating conditions which optimise it are considered. On suitable samples the angular resolution may be substantially improved by data averaging using an edge preserving Kuwahara filter. It is shown that measurements of misorientation by direct comparison of diffraction patterns can reduce the angular resolution to below 0·02°, and the application of this method to linescans and EBSD maps is discussed. It is concluded that the applicability of pattern comparison methods for EBSD maps is limited by time and microstructural considerations, but linescans using this method are shown to produce high quality data in material containing small misorientations, which cannot readily be analysed by the conventional Hough transform EBSD method.
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