Abstract
The fabrication methods of Nd–Fe–B thin and thick films, methods for structuring films, and methods of making Nd–Fe–B microparts are reviewed. The dependence of film properties on deposition conditions is considered in detail.
Get full access to this article
View all access options for this article.
References
1.
FASTENAU
R. H. J.
van LOENEN
E. J.
: J. Magn. Magn. Mater ., 1996 , 157/158 , 1 –6 .
2.
HANITSCH
R.
: J. Magn. Magn. Mater ., 1989 , 80 , 119 –130 .
3.
RAMSDEN
v. s.
: in `Rare-earth magnets and their applications', Vol. 2, (ed.
Schultz
L.
Muller
K.-H.
), 623-642; 1998, Frankfurt, Werkstoff-Informationsgesellschaft mbH.
4.
CAMPBELL
P.
: in `Rare-earth magnets and their applications', Vol. 2, (ed.
Schultz
L.
Muller
K.-H.
), 681-687; 1998, Frankfurt, Werkstoff-Informationsgesellschaft mbH.
5.
HONDA
T.
ARAI
K. I.
ISHIYAMA
K.
: IEEE Trans. Magn ., 1996 , 32 , (5 ), 5085 –5087 .
6.
de BHAILIS
D.
MURRAY
C.
DUFFY
M.
ALDERMAN
J.
KELLY
G.
MATH-CNA
S. C. Ô
: in ‘Proc. 9th Workshop on Micromachining, Micromechanics and Microsystems MME '98’ , Ulvik, Norway , 3-5 June 1988 , 256 –259.
7.
SHINOZAWA
Y.
ABE
T.
KONDO
T.
: in ‘Proc. IEEE Micro Electro Mechanical Systems’ , Piscataway, NJ , 1997 , Institu-tion of Electrical and Electronics Engineers , 233 –237 .
8.
FEUSTEL
A.
KRUSEMARK
O.
MULLER
J.
: in ‘Proc. Micro System Technologies '96 (MST)’ , Potsdam, Germany, 17-19 September 1996, (ed.
Reichl
H.
Heuberger
A.
); 1996, Berlin, Offenbach, VDE-Verlag.
9.
LOSANTOS
P.
PLAZA
J. A.
ESTEVE
J.
CANE
C.
: in ‘Eurosensors XI, 11th European Conf. on Solid State Transducers’ , Warsaw, Poland, 21-24 September 1997, Warsaw University of Technology, Vol. 3, 1591-1594.
10.
WAGNER
B.
KREUTZER
M.
BENECKE
W.
:J. Microelectromechan. Syst ., 1993 , 2 , (1 ), 23 –29 .
11.
CAROTENUTO
R.
LAMBERTI
N.
IULA
A.
PAPPALARDO
M.
: Sensors Actuators , 1999 , 72 , 262 –268 .
12.
KLUPZIG
M.
WURMUS
H.
SCHWESINGER
N.
HEIM
U.
OBERTHUR
S.
ALBRECHT
A.
BARTSCH
H.
: in
‘Proc. 9th Workshop on Micromachining, Micromechanics and Micro-systems MME '98’ , 3 –5 1998, Ulvik , Norway, 1998, 198-201 .
13.
YAMASHITA
S.
YAMASAKI
J.
IKEDA
M.
IWABUCHI
N.
: J. Magn. Soc. Jpn, 1991, 15, (2), 241-244 (Translation in IEEE Transl. J. Magn. Jpn, 1992, 7, (1), 45-50).
14.
YAMASHITA
S.
YAMASAKI
J.
IKEDA
M.
IWABUCHI
N.
: J. Appl. Phys ., 1991 , 70 , (10 ), 6627 –6629 .
15.
SHEARWOOD
C.
WILLIAMS
C. B.
YATES
R. B.
: in ‘Eurosensors XI, 11th European Conf. on Solid State Transducers’ , Warsaw, Poland, 21-24 September 1997, Warsaw University of Technology, Vol. 2, 767-770.
16.
AFFANE
W.
BIRCH
T. S.
: Sensors Actuators A, 1995, 46-47, 584-587.
17.
KALLENBACH
E.
ALBRECHT
A.
BIRLI
O.
ECCARIUS
M.
FEINDT
C.
ZUPPIG
v.
: in ‘15th Int. Kolloq. Feinwerktechnik’, Mainz, Germany, 25-26 September 1995, Institut Ilk Mikro-technik GmbH, 8 pp.
18.
MADOU
M.
: ‘Fundamentals of microfabrication’ , 422 –423 ; 1997 , Boca Raton, FL , CRC Press .
19.
BUSCH-VISHNIAC
I. J.
: Sensors Actuators A , 1992 , 33 , 207 –220 .
20.
FUJITA
H.
: in ‘Proc. 1989 IEEE Int. Conf. on Robotics and Automation’ , Vol. 3 , 1559 –1564 ; 1989 , Washington, DC , IEEE Computer Society Press.
21.
TRIMMER
W.
JEBENS
R.
: in ‘Proc. 1989 IEEE Int. Conf. on Robotic and Automation’ , Vol. 3 , 1547 –1552 ; 1989 , Washington, DC , IEEE Computer Society Press.
22.
GILBERTSON
R. G.
BUSCH
J. D.
: ‘A survey of micro-actuator technologies for future spacecraft missions’: http://www. nanothinc.com / nanosci / microtech / mems / ten-actuators / gilbertson.ht.
23.
BANCEL
F.
LEMARQUAND
G.
: IEEE Trans. Magn ., 1998 , 34 , (1 ), 242 –247 .
24.
GREEN
A.
ELY
D.
: MST News , 1997 , (20) , 16 –17.
25.
CHAMPION
E.
BERTRAM
H. N.
: IEEE Trans. Magn ., 1995 , 31 , (6 ), 2642 –2644 .
26.
NAGATA
Y.
TOSAKI
Y.
FUKAZAWA
T.
ISHIZUKA
S.
WADA
K.
MITANI
S.
NAKAMURA
K.
: IEEE Trans. Magn ., 1995 , 31 , (6 ), 2648 –2650 .
27.
CADIEU
F. J.
: J. Appl. Phys ., 1987 , 61 , 4105 –4110 .
28.
ADAM
J. D.
: J. Appl. Phys ., 1987 , 61 , (8 ), 4111 .
29.
STANCIL
D. D.
: J. Appl. Phys ., 1987 , 61 , (8 ), 4111 .
30.
LEVY
M.
SCARMOZZINO
R.
OSGOOD
R. M.
Jr
WOLFE
R.
CADIEU
F. J.
HEDGE
H.
GUTIERREZ
C. J.
PRINZ
G. A.
: J. Appl. Phys ., 1994 , 75 , (10 ), 6286 –6288 .
31.
MAPPS
D. J.
CHANDRASEKHAR
R.
O'GRADY
K.
CAMBRIDGE
J.
PETFORDLONG
A.
DOOLE
R.
: IEEE Trans. Magn., 1997 , 33 , (5) , 3007 –3009.
32.
GEURTSEN
A. J. M.
'cooLs
J. C. S.
deWIT
L.
LODDER
J. C.
: Appl. Surf. Sci. , 1996, 96-98, 887-890.
33.
LEMKE
H.
GoDDENHENRICH
T.
HEIDEN
C.
THOMAS
G.
: IEEE Trans. Magn., 1997 , 33 , (5) , 3865 –3867.
34.
CHOU
s. Y.
KRAUSS
R R.
: J. Appl. Phys ., 1996 , 79 , (8 ), 5066 .
35.
ZASADZINSKI
J. F.
SEGRE
C. U.
RIPPERT
E. D.
: J. Appl. Phys ., 1987 , 61 , 4278 –4280 .
36.
SHIMA
T.
KAMEGAWA
A.
AOYAGI
E.
HAYASAKA
Y.
FUJIMORE
H.
J. Magn. Magn. Mater., 1998, 177-181, 911-912.
37.
HANSEN
P.
HEITMANN
H.
: IEEE Trans. Magn ., 1989 , 25 , (6 ), 4390 –4404 .
38.
FUJIWARA
H.
: in ‘Encyclopedia of applied physics’ , Vol. 16 , 149 –184 ; 1996 , New York, VCH Publishers, Inc.
39.
HERBST
J. F.
: Rev. Modern Phys ., 1991 , 63 , 819 –898 .
40.
CADIEU
F.
: in ‘Physics of thin films’ , Vol. 16 , 145 –231 ; 1992 , London, Academic Press.
41.
CADIEU
F. J.
: Int. Mater. Rev ., 1995 , 40 , (4 ), 137 –148 .
42.
BUSCHOW
K. H. J.
: J. Magn. Magn. Mater ., 1989 , 80 , 1 –8 .
43.
BUSCHOW
K. H. J.
FEHEN
F. H. J.
de KORT
K.
: J. Magn. Magn. Mater., 1995, 140-144, 9-12.
44.
RICHMAN
R. J.
McNAUGHTON
W. P.
: J. Electron. Mater., 1997 , 26 , (5) , 415 –422.
45.
BURZO
E.
: Rep. Prog. Phys ., 1998 , 61 , 1099 –1266 .
46.
SAGAWA
M.
HIROSAWA
S.
YAMAMOTO
H.
FUJIMURA
S.
MATSUURA
Y.
: Jpn J. Appl. Phys ., 1987 , 26 , 785 –800 .
47.
PARHOFER
S.
KUHRT
C.
WECKER
J.
GIERES
G.
: J. Appl. Phys., 1998 , 83 , (5) , 2735 –2741.
48.
RODEWALD
W.
WALL
B.
FERNENGEL
W.
KATTER
M.
ANTOCHIN
S.
: in `Rare-earth magnets and their applications', Vol. 2, (ed.
Schultz
L.
Muller
K.-H.
), 1021-1027; 1998, Frankfurt, Werkstoff-Informationsgesellschaft mbH.
49.
MURALIDHAR
G. K.
WINDOW
B.
SOOD
D. K.
ZMOOD
R. B.
: J. Mater. Sci ., 1998 , 33 , 1349 –1357 .
50.
KEAVNEY
D. J.
FULLERTON
E. E.
PEARSON
J. E.
BADER
S. D.
: IEEE Trans. Magn., 1996 , 32 , (5) , 4440 –4442.
51.
KEAVNEY
D. J.
FULLERTON
E. E.
PEARSON
J. E.
BADER
S. D.
: J. Appl. Phys ., 1997 , 81 , (8 ), 4441 –4443 .
52.
GASGNIER
M.
COLLIEX
C.
MANOUBI
T.
: J. Appl. Phys ., 1986 , 59 , 989 –992 .
53.
YAO
Y. D.
WU
K. T.
CHEN
Y. Y.
HSU
D. N.
: J. Appl. Phys ., 1993 , 73 , 5881 –5883 .
54.
WU
K. T.
YAO
Y. D.
KLIK
I.
: Appl. Surf. Sci ., 1997 , 113/114 , 174 –177 .
55.
PEREIRA
L. G.
TEIXEIRA
S. R.
SCHREINER
W. H.
MISSELL
F. P.
BAUMVOL
I. J. R.
: Phys. Status Solidi (a) , 1991 , 125 , 625 –634 .
56.
LEMKE
H.
ECHER
C.
THOMAS
G.
: IEEE Trans. Magn ., 1996 , 32 , (5 ), 4404 –4406 .
57.
YANG
C. J.
KIM
S. W.
KANG
J. S.
: J. Magn. Magn. Mater ., 1998 , 188 , 100 –108 .
58.
KRUUSING
A.
: 1998, Unpublished results.
59.
CADIEU
F. J.
CHENCINSKI
N.
: IEEE Trans. Magn., 1975, MAG-
11 , (2) , 227 –230.
60.
PARHOFER
S.
GIERES
G.
WECKER
J.
SCHULTZ
L.
: J. Magn. Magn. Mater ., 1996 , 163 , 32 –38 .
61.
ABDELLATEEF
M. A.
LEMKE
H.
HEIDEN
C.
: Phys. Status Solidi (a) , 1995 , 147 , K39—K43 .
62.
SUN
H.
TOMIDA
T.
HIROSAWA
S.
MAEHARA
Y.
: J. Magn. Magn. Mater ., 1996 , 164 , 18 –26 .
63.
ZASADZINSKI
J. F.
SEGRE
C. U.
RIPPERT
E. D.
CHRZAS
J.
RADUSEWICZ
R
: Mater. Res. Soc. Symp. Proc ., 1987 , 96 , 55 –63 .
64.
LEMKE
H.
MULLER
S.
GoDDENHENRICH
T.
HEIDEN
C.
: Phys. Status Solidi (a) , 1995 , 150 , 723 –731 .
65.
TSAI
J. L.
CHIN
T. S.
: in `Rare-earth magnets and their applications', Vol. 2, (ed.
Schultz
L.
Muller
K.-H.
), 1067-1075; 1998, Frankfurt, Werkstoff-Informationsgesell-schaft mbH.
66.
LEMKE
H.
LANG
T.
GöDDENHENRICH
T.
HEIDEN
C.
: J. Magn. Magn. Mater ., 1995 , 148 , 426 –432 .
67.
ARAKI
T.
OKABE
M.
: in ‘IEEE Micro Electro Mechanical Systems Workshop’ , Piscataway, NJ , 1996 , Institution of Electrical and Electronics Engineers , 244 –249.
68.
ARAKI
T.
NAKANISHI
T.
TJMEMURA
T.
: J. Appl. Phys ., 1999 , 85 , 4877 –4879 .
69.
CADIEU
F. J.
CHEUNG
T. D.
WICKRAMASEKARA
L.
KAMPRATTE
N.
IEEE Trans. Magn., 1986, MAG-22, 752-754.
70.
HOMBURG
H.
, Th. SINNEMANN, S. METTIFESSEL, M. ROSENBERG , and B. X. GU: J. Magn. Magn. Mater ., 1990 , 83 , 231 –233 .
71.
GU
B. X.
HSIA
Y.
LIU
R.
ZHAI
H. R.
HOMBURG
H.
METHFESSEL
S.
: Hyperfine Interact ., 1990 , 55 , 957 –960 .
72.
WECKER
J.
SCHULTZ
L.
: J. Appl. Phys ., 1987 , 62 , 990 –993 .
73.
Yu
M.
LIU
Y.
mu
S. H.',
SELLMYER
D. J.
: J. Appl. Phys ., 1998 , 83 , 6611 –6613 .
74.
PIRAMANAYAGAM
S. N.
MATSUMOTO
M.
MORISAKO
A.
TAKEI
s.
: J. Magn. Soc. Jpn , 1997 , 21 , 417 –420 .
75.
KAPITANOV
B. A.
KORNILOV
N. V.
, Ya. L. LINETSKY , and v. Yu. TSVETKOV: J. Magn. Magn. Mater ., 1993 , 127 , 289 –297 .
76.
AYLESWORTH
K. D.
ZHAO
Z. R.
SELLMYER
D. J.
HADJIPANAYIS
G. C.
: J. Magn. Magn. Mater ., 1989 , 82 , 48 –56 .
77.
STRZESZEWSKI
J.
NAZARETH
A.
HADJIPANAYIS
G. C.
AYLESWORTH
K.
ZHAO
Z. R.
SELLMYER
D. J.
: Mater. Sci. Eng ., 1988 , 99 , 153 –156 .
78.
VEKSHIN
B. S.
KAPITANOV
B. A.
KORNILOV
N. V.
LIPETSKY
Ya. L.
RAIGORODSKY
V. M.
SOKOLOVSKY
S. E.
TSVETKOV
V. Yu.
: Elektrotekhnika (Russia), 1989, 60, (11), 18-20 (in Russian).
79.
WYSLOCKI
J. J.
: J. Mater. Sci ., 1992 , 27 , 3777 –3781 .
80.
WYSLOCKI
J. J.
: J. Magn. Magn. Mater., 1992, 104-107, 363-364.
81.
KNELLER
E. F.
HAWIG
R.
: IEEE Trans. Magn ., 1991 , 27 , 3588 –3600 .
82.
GOUTEFF
P. C.
FOLKS
L.
STREET
R.
: J. Magn. Magn. Mater ., 1998 , 177 –181 , 1241 -1242.
83.
LINETSKY
Ya. L.
RAIGORODSKY
V. M.
Yu
V.
. TSVETKOV : J. Alloy. Compd ., 1992 , 184 , 35 –42 .
84.
CADIEU
F. J.
CHEUNG
T. D.
WICKRAMASEKARA
L.
: J. Magn. Magn. Mater., 1986, 54-57, 535-536.
85.
CADIEU
F. J.
CHEUNG
T. D.
WICKRAMASEKARA
L.
KAMPRATH
N.
HEDGE
H.
Liu
N. C.
: J. Appl. Phys ., 1987 , 62 , 3866 –3872 .
86.
OVERFELDT
R. A.
ANDERSON
C. D.
FLANAGAN
W. F.
: Appl. Phys. Lett ., 1986 , 49 , 1799 –1801 .
87.
AYLESWORTH
K. D.
ZHAO
Z. R.
SELLMYER
D. J.
HADJIPANAYIS
G. C.
: J. Appl. Phys ., 1988 , 64 , 5742 –5744 .
88.
ANDREOULI
C.
CHRISTOULAKIS
S.
TSETSEKOU
A.
EFTHMIOPOULOS
T.
: Key Eng. Mater ., 1997 , 132 –135 , 1281 -1284.
89.
YOUNG
K. H.
: Physica C , 1993 , 211 , 1 –12 .
90.
GRöTZSCHEL
R.
MADER
M.
KREISSIG
U.
GRIGULL
S.
ASSMANN
W.
PARHOFER
s.
: Nucl. Instrum. Methods Phys. Res. B , 1996 , 118 , 139 –143 .
91.
PARHOFER
S. M.
WECKER
J.
KUHRT
C.
, G GIERES, and L. SCHULTZ: IEEE Trans. Magn., 1996 , 32 , (5) , 4437 –4439.
92.
PIRAMANAYAGAM
S. N.
MATSUMOTO
M.
MORISAKO
A.
TAKEI
S.
: IEEE Trans. Magn., 1997 , 33 , (5) , 3643 –3645.
93.
TALVITIE
M.
: Acta Polytech. Scand. Appl. Phys. Ser. , 1993 , (187) , 1 –58.
94.
AYLESWORTH
K. D.
SELLMYER
D. J.
: J. Magn. Magn. Mater ., 1991 , 98 , 65 –70 .
95.
SHIMA
T.
KAMEGAWA
A.
FUJIMORE
H.
in ‘Rare-earth magnets and their applications’, Vol. 2, (ed.
Schultz
L.
Muller
K.-H.
), 1029-1034; 1998, Frankfurt, Werkstoff-Informationsgesellschaft mbH.
96.
NAZARETH
A. S.
CHOPRA
H. D.
SOOD
D. K.
ZMOOD
R. B.
: Mater. Res. Soc. Symp. Proc ., 1995 , 354 , 511 –516 .
97.
SALAS
F. H.
DEHESA
C.
PEREZ
G. T.
ALAMEDA
J. M.
: J. Magn. Magn. Mater ., 1993 , 121 , 548 –551 .
98.
TSAI
J. L.
HUANG
E. Y.
CHIN
T. S.
: IEEE Trans. Magn., 1997 , 33 , (5) , 3646 –3648.
99.
TSAI
J. L.
CHIN
T. S.
: in `Rare-earth magnets and their applications', Vol. 2, (ed.
Schultz
L.
Muller
K.-H.
), 1057-1065; 1998, Frankfurt, Werkstoff-Informationsgesell-schaft mbH.
100.
SHINDO
M.
ISHIZONE
M.
KATO
H.
MIYAZAKI
T.
SAKUMA
A.
: J. Magn. Magn. Mater ., 1996 , 161 , L1—L5 .
101.
TSAI
J. L.
CHIN
T. S.
: in ‘Magnetic anisotropy and coercivity in rare-earth transition metal alloys’ , (ed.
Schultz
L.
Muller
K.-H.
), 327-334; 1998, Frankfurt, Werkstoff-Informations-gesellschaft mbH.
102.
LEMKE
H.
THOMAS
G.
MEDLIN
D. L.
: Nanostructured Mater ., 1997 , 9 , 371 –374 .
103.
NEWNHAM
S. J.
JAKUBOVICS
J. P.
DAYKIN
A. C.
: J. Magn. Magn. Mater ., 1996 , 157/158 , 39 –40 .
104.
NAKAI
J.
KIKUCHI
A.
KUWABARA
M.
SAKURAI
T.
SHIMATSU
T.
TAKAHASHI
M.
: IEEE Trans. Magn ., 1995 , 31 , (6 ), 2833 –2835 .
105.
TAKAHASHI
M.
KIKUCHI
A.
KAWAKITA
S.
: IEEE Trans. Magn., 1997 , 33 , (5) , 2938 –2943.
106.
OHRING
M.
: ‘The materials science of thin films’ , 95 –96 ; 1994 , Boston, MA , Academic Press .
107.
CHRISEY
D. B.
HUBLER
G. K.
(eds.): ‘Pulsed laser deposition of thin films’, 347; 1992, New York, Wiley.
108.
CHEUNG
T. D.
, XIAOQIN GUO , and F. J. CADIEU: J. Appl. Phys ., 1987 , 61 , 3979 –3981 .
109.
PANAGIOTOPOULOS
I.
MENG-BURANY
X.
HAJIPANAYIS
G. C.
: J. Magn. Magn. Mater ., 1997 , 172 , 225 –228 .
110.
SKOMSKI
R.
COEY
J. M. D.
: Phys. Rev. B , 1993 , 48 , (21 ), 15812 –15816 .
111.
SMOMSKI
R.
COEY
J. M. D.
: IEEE Trans. Magn ., 1994 , 29 , (6 ), 2680 –2682 .
112.
IDZIKOWSKI
B.
WOLF
M.
HANDSTEIN
A.
NENKOV
K.
ENGELMANN
H.-J.
STOBIECKI
F.
MaLLER
K.-H.
: IEEE Trans. Magn ., 1997 , 33 , (5 ), 3559 –3561 .
113.
FUKUNAGA
H.
KANAI
Y.
: in ‘Magnetic anisotropy and coercivity in rare-earth transition metal alloys’ , Vol. 1, (ed L. Schultz and K.-H. Muller), 237-250; 1998, Frankfurt, Werkstoff-Informationsgesellschaft mbH.
114.
LIU
J. F.
DAVIES
H. A.
: J. Magn. Magn. Mater ., 1996 , 157/158 , 29 –30 .
115.
PAWLOWSKI
B.
BEER
H.
TöPFER
J.
: Key Eng. Mater ., 1997 , 132 –136 , 1409 -1411.
116.
HOFFMEISTER
H.-w.
WENDA
A.
: in ‘Micro system tech-nologies 98, 6th Int. Conf. on Micro Electro, Opto, Mechanical Systems and Components’ , Potsdam, 1-3 December 1998, (ed.
Reichl
H.
Obermeier
E.
), 433-438; 1998, Berlin, Offenbach, VDE-Verlag GmbH.
117.
DARIO
P.
CARROZZA
M. C.
CROCE
N.
MONTESI
M. C.
cocco
M.
: J. Micromech. Microeng ., 1995 , 5 , 64 –71 .
118.
KRUUSING
A.
LEPPAVUORI
S.
UUSIMAKI
A.
, and Br. PETRPTIS : Sensors Actuators A , 1999 , 74 , 45 –51 .
119.
EHRFELD
W.
LEHR
H.
MICHEL
F.
WOLF
A.
, II.-P. GRUBER , and A. BERTHOLDS: Proc. SPIE , 1996 , 2879 , 332 –337 .
120.
POPOVIC
G.
WOLF
A.
PETROVIC
D.
BRENNER
W.
VUJANIC
A.
HERBST
P.
: in ‘Micro System Technologies 98, 6th Int. Conf. on Micro Electro, Opto, Mechanical Systems and Components’ , Potsdam, 1-3 December 1998, (ed.
Reichl
H.
Obermeier
E.
), 349-354; 1998, Berlin, Offenbach, VDE-Verlag GmbH.
121.
MAKITA
K.
YAMASHITA
O.
NAKANISHI
A.
: J. Magn. Soc. Jpn , 1998 , 22 , 365 –368 .
122.
OTSUKA
T.
MORITANI
H.
: Jpn Kokai Tokkyo Koho JP 02 31,401 [90 31,401], Cl. H01 F1/06, 01 Feb 1990, Appl. 88/180,385, 21 July 1998; 8 pp.
123.
HILLERICH
B.
RODE
M.
: in ‘Micro System Technologies 98, 6th Int. Conf. on Micro Electro, Opto, Mechanical Systems and Components’ , Potsdam, 1-3 December 1998, (ed.
Reichl
H.
Obermeier
E.
), 545-550; 1998, Berlin, Offenbach, VDE-Verlag GmbH.
124.
LEE
R. W.
: Appl. Phys. Lett ., 1985 , 46 , (8 ), 790 –791 .
125.
ROTA
A.
DUONG
V.
HARTWIG
T.
: in `Micro system tech-nologies 98, 6th Int. Conf. on Micro Electro, Opto, Mechanical Systems and Components', Potsdam, 1-3 December 1998, (ed.
Reichl
H.
Obermeier
E.
), 539-544; 1998, Berlin, Offenbach, VDE-Verlag GmbH.
126.
PAWLOWSKI
B.
RAHMIG
A.
TöPFER
J.
: in ‘Rare-earth magnets and their applications’ , Vol. 2 , (ed.
Schultz
L.
Muller
K.-H.
, 1045 –1049 ; 1998 , Frankfurt , Werkstoff-Informationsgesellschaft mbH .
127.
KUKLA
C. G.
HANNENHEIM
W.
LOIBL
H.
: in ‘Micro System Technologies 98, 6th Int. Conf. on Micro Electro, Opto, Mechanical Systems and Components’ , Potsdam, 1-3 December 1998, (ed.
Reichl
H.
Obermeier
E.
), 337-342; 1998, Berlin, Offenbach, VDE-Verlag GmbH.
128.
SHAN
X.
YANAGISAWA
K.
: Int. J. Jpn Soc. Precis. Eng ., 1997 , 31 , (2 ), 121 –122 .
129.
KANEKO
Y.
ISHIGAKI
N.
: J. Mater. Eng. Perform ., 1994 , 3 , 228 –233 .
130.
HIROSAWA
s.
KANEKO
Y.
: in ‘Rare-earth magnets and their applications’ , Vol. 1 , 43 –53 ; 1998 , Frankfurt, Werkstoff-Informationsgesellschaft mbH.
131.
de KORT
K.
: in ‘Proc. of 14th Int. Workshop on Rare-Earth Magnets and Their Applications’ , sao Paulo, Brazil, 1-4 September 1996 , Vol. 1 , 47 –56 ; 1996 , Singapore, World Scientific.
132.
CADIEU
F. J.
: J. Vac. Sci. Technol. A , 1988 , 6 , (3 ), 1668 –1674 .
133.
SELLMYER
D. J.
ZHAO
Z. R.
SHAN
z. S.
: J. Appl. Phys ., 1987 , 61 , (8 ), 3779 .
134.
YAMASHITA
S.
IKEDA
M.
HARA
K.
: IEEE Transl. J. Magn. Jpn , 1988 , 3 , 440 –441 .
135.
RAIGORODSKY
V. M.
, Ya. L. LINETSKY, S. E. SOKOLOVSKY, and Yu. TZVETKOV: /ZV. VUZOV, Tchern. Metall. (Russia), 1990, 9, 56 (in Russian).
136.
PANAGIOTOPOULOS
I.
NICOLAIDES
G. K.
PSYCHARIS
V.
NIARCHOS
D.
: J. Alloy. Compd ., 1994 , 205 , 45 –47 .
137.
LILEEV
A. S.
TYAGUNOV
Ye. V.
BACHINSKIY
Yu. B.
: in ‘Rare-earth magnets and their applications’, Vol. 2, (ed.
Schultz
L.
Muller
K.-H.
), 1035-1043; 1998, Frankfurt, Werkstoff-Informationsgesellschaft mbH.
