Abstract
Polycrystalline SBTN ferroelectric thin films were prepared by the sol–gel method with various Nb mole ratioson Pt/SiO2/Si(100) substrates. The films were annealed at different temperatures and characterised in terms of phase and microstructure. A relatively well saturated hysteresis pattern was obtained at x=0.2 in Sr0.8Bi2.3(Ta1-xNbx)2O9+α thin films. At an applied voltage of 5 V, the dielectric constant ε r and dissipation factor tan δ of a typical Sr0.8Bi2.3(Ta1-xNbx)2O9+α thin film (x=0.2) were about 236.2 and 0.034. Measured remanent polarisation 2P r and coercive field E c were 4.28 µC cm2, and 38.88 kV cm1 respectively. No fatigue was observed up to 6×1010 switching cycles at 5 V and the normalised polarisation reduced by a factor of only 4%.
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