The impact of structural design on magnetron-sputtered amorphous thin films

Abstract

The mono- and multilayer designs formed with the identical target elements but different sputtering powers were compared. By merely altering the sputtering conditions, it is remarkable to ascertain the impact of the structural design with the same elements. The tribological (corrosive), adhesive, and electrochemical results of Zr-Al monolayer and Zr-Al(M) multilayer thin films in metallic glass form are presented. Multilayer design increased the plastic deformation resistance and delayed the corrosive solution from reaching the substrate surface. These two processes slowed the wear rate of the multilayer in a corrosive environment. The passive layer's vulnerability was observed to be a major reason for the multilayer's increased friction coefficient compared to that of the monolayer. The passage of the tip between the layers may have increased the friction coefficient due to a chaotic situation. Furthermore, a durable passive oxide layer and a large amount of the (Al⁺³)-oxide component may have lowered the coefficient of Zr-Al. The deformation-resistant multilayer film generated a considerable amount of internal stress after the load increased from 0 to 60 N. An earlier adhesion failure occurred because the film and substrate were incompatible due to the internal stress. The multilayer's corrosion rate and current density were reduced by 50% as a result of the delay of the corrosion solution.