The overall intent of this work has been to develop batch-fabricatable micromotors that can couple power to a load. Ferroelectric thin films of lead zirconate titanate (PZT) fabricated for application as flexure-wave piezoelectric micromotors are generally characterized by low speed and high torque, eliminating complex gearing. In this paper, alternate thin film material systems that engender higher strain levels through new mechanisms as active elements of an actuator are examined.
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