Modeling of Electric and Fluid Fields in Silicon Microactuators *

Abstract

Modeling of electric and fluid fields in variable-capacitance salient-pole side-drive micromotors is described. For electric field modeling, the actual three-dimensional geometry of a micromotor is analyzed. For fluid field modeling, a simple model consisting of a thin flat disk which is subsequently improved by adding a bushing, stator, and bearing to improve the model toward that of an actual micromotor is considered.