Nonequilibrium, self-consistent radio frequency (rf) glow discharge simulations are described. The fluid transport is solved by a more accurate flux-corrected transport (MAFCT) algorithm. A staggered-mesh method is used for the arrangement for discretizing the variables used in the fluid model. Vectorization and multitasking methods are used to optimize the compu tation time required by the simulation. Consequently, the simulation code is fully vectorized, and the speedup ratio between the original code and the fully vectorized code approaches 11.7. Moreover, the multi tasking has a speedup ratio of 1.988 on the two- processor CRAY X-MP/24. The simulation results are compared with other model results to demonstrate the advantage of MAFCT. These results are also compared with experimental results. A better understanding of rf discharge mechanisms is accomplished through the use of a CRAY X-MP supercomputer, which provides a solution within a reasonable turnaround time.
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