Nonlinear Analysis of MEMS Electrostatic Microactuators: Primary and Secondary Resonances of the First Mode*

Abstract

We use a discretization technique that combines the differential quadrature method (DQM) and the finite difference method (FDM) for the space and time, respectively, to study the dynamic behavior of a microbeam-based electrostatic microactuator. The adopted mathematical model based on the Euler— Bernoulli beam theory accounts for the system nonlinearities due to mid-plane stretching and electrostatic force. The nonlinear algebraic system obtained by the DQM—FDM is used to investigate the limit-cycle solutions of the microactuator. The stability of these solutions is ascertained using Floquet theory and/or long-time integration. The method is applied for large excitation amplitudes and large quality factors for primary and secondary resonances of the first mode in case of hardening-type and softening-type behaviors. We show that the combined DQM—FDM technique improves convergence of the dynamic solutions. We identify primary, subharmonic, and superharmonic resonances of the microactuator. We observe the occurrence of dynamic pull-in due to subharmonic and superharmonic resonances as the excitation amplitude is increased. Simultaneous resonances of the first and higher modes are identified for large orbits in both primary and secondary resonances.

Keywords

Microelectromechanical systems microactuator differential quadrature method finite difference method secondary resonance simultaneous resonance.

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