Development of safety certification standards for semiconductor equipment for prevention of occupational accidents in Korea: A methodology based on semiconductor equipment and materials international (SEMI) standards

Abstract

Background

The rise of digital devices in the fourth industrial revolution has increased the demand for semiconductor safety. International Safety Certification Standards (SEMI) help prevent accidents in the semiconductor industry, but workers outside of Japan are still at risk.

Objective

This study creates safety certification criteria for Korean semiconductor equipment by adapting SEMI standards, local laws, and technical guidelines to reduce facility-related risks.

Methods

A self-certification system based on SEMI guidelines was developed through a global standard review, a manufacturer survey, and a Focus Group Interview to valid its applicability.

Results

Japan uses a self-certification system, while other countries depend on SEMI, ISO, and IEC. To ensure domestic semiconductor equipment safety, aligning SEMI standards with Korea's Occupational Safety and Health Act. A survey showed strong reliability (a Cronbach's alpha value of 0.886) with 76.2% favorable and 4.8% unfavorable responses.

Conclusion

This methodology allows Korea's semiconductor industry to comply with both domestic laws and SEMI guidelines, strengthening global trade and safety. However, the focus on a specific group of manufacturers and experts has limited research, requiring further validation in actual production environments. Future research should refine its practical application and expand to other high-tech industries.