This paper presents an approach for self-sensing piezoelectric valves. Both displacement and actuation force of piezoelectric valve can be simultaneously estimated from measurements of the charge and driving voltage. Only simple calibration is required before engineering application. The charge is obtained by software integration of the piezoelectric current sampled by DAQ card, which has the advantage of compensating leakage current by pre-estimating the leakage resistance. A PID controller is used to track the displacement, and a feedfoward compensation using Prandtl–Ishlinskii model is taken to compensate the piezoelectric hysteresis. The experimental results show that the controller can track target displacement within 2.03% of error, track force within 1.80% of error, and the maximum hysteresis of actuator is compensated from 27% to 3.75%.
AsghariMRezaeiSMRezaieAH, et al. (2015) Self-sensing actuation using online capacitance measurement with application to active vibration control. Journal of Intelligent Material Systems and Structures26(2): 186–200.
2.
BadelAQiuJHNakanoT (2008) Self-sensing force control of a piezoelectric actuator. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control55(12): 2571–2581.
3.
BoettcherUMatthesLKniggeB, et al. (2012) Suppression of cross-track vibrations using a self-sensing micro-actuator in hard disk drives. Microsystem Technologies18(9–10): 1309–1317.
4.
BrunoNZhuYLiuC, et al. (2019) Development of a piezoelectric high speed on/off valve and its application to pneumatic closed-loop position control system. Journal of Mechanical Science and Technology33(6): 2747–2759.
5.
CaiCBCuiYGSunQL, et al. (2016) PID control with self-sensing feedback for a piezoelectric micro-gripper. Nanotechnology and Precision Engineering14(2): 118–123.
6.
CuiYGCaiCBLouJQ (2016) Displacement compound control of piezoelectric micro-gripper using self-sensing feedback. Chinese Journal of Scientific Instrument37(2): 330–338.
7.
DoschJJInmanDJGarciaE (1992) A self-sensing piezoelectric actuator for collocated control. Journal of Intelligent Material Systems and Structures3(1): 166–185.
8.
FaeghSJaliliNYavuzcetinO, et al. (2013) A cost-effective self-sensing biosensor for detection of biological species at ultralow concentrations. Journal of Applied Physics113(22): 687–690.
9.
GouXKLiDP (2011) Study on flexibal cantilever beam vibration control system based on piezoelectric self-sensing actuator. Piezoelectric & Acoustooptics33(5): 753–756.
10.
HongFPangCK (2012) Robust vibration control at critical resonant modes using indirect-driven self-sensing actuation in mechatronic systems. ISA Transactions51: 834–840.
11.
HuBWanJPangCK (2017a) Self-sensing actuation for improved audio-induced vibration rejection in dual-stage hard disk drives. Microsystem Technologies23(11): 5203–5210.
12.
HuBWanJPangCK (2017b) Head-on-media detection with PZT self-sensing actuation in dual-stage hard disk drives. IEEE Transactions on Magnetics53(3): 9400406.
13.
IkedaHMoritaT (2011) High-precision positioning using a self-sensing piezoelectric actuator control with a differential detection method. Sensors and Actuators A: Physical170: 147–155.
14.
IshikiriyamaYMoritaT (2010) Improvement of self-sensing piezoelectric actuator control using permittivity change detection. Journal of Advanced Mechanical Design Systems and Manufacturing4: 143–149.
15.
IslamMNSeethalerRJ (2012a) Note: Position self-sensing for piezoelectric actuators in the presence of creep and rate-dependent hysteresis. Review of Scientific Instruments83(11): 116101.
16.
IslamMNSeethalerRJ (2012b) Self-sensing tracking control for piezoelectric actuators based on sensor fusion. In: Tomizuka M, Yun C-B, Lynch JP (eds) Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems, vol. 8345. San Diego, CA, pp.1–11.
17.
IvanIARakotondrabeMLutzP, et al. (2009) Current integration force and displacement self-sensing method for cantilevered piezoelectric actuators. Review of Scientific Instruments80: 126103.
18.
JayaramKJafferisNTDoshiN, et al. (2018) Concomitant sensing and actuation for piezoelectric microrobots. Smart Materials and Structures27(6): 065028.
19.
LiTFuB (2009) Development of piezoelectric valve and its application. Fluid Power Transmission and Control37(6): 1–5.
20.
LiuYBChenFLZhangLS, et al. (2015) Self-sensing vibration suppression based on charger driven piezoelements. Journal of Vibration and Shock34(12): 42–45.
21.
MansourSZSeethalerRJ (2017) Simultaneous displacement and force estimation of piezoelectric stack actuators using charge and voltage measurements. IEEE/ASME Transactions on Mechatronics22(6): 2619–2624.
22.
McPhersonTUedaJ (2014) A force and displacement self-sensing piezoelectric MRI-compatible tweezer end effector with an on-site calibration procedure. IEEE/ASME Transactions on Mechatronics19(2): 755–764.
23.
Mohd JaniJLearyMSubicA, et al. (2014) A review of shape memory alloy research, applications and opportunities. Materials & Design56: 1078–1113.
24.
PelletierAMicheauPBerryA (2018) Harmonic active vibration control using piezoelectric self-sensing actuation with complete digital compensation. Journal of Intelligent Material Systems and Structures29(7): 1510–1519.
25.
PengCCaoSPLuoXH (2014) Study on the dynamic performance of a piezoelectric stack actuator for electro-hydraulic servo valve. Machine Tool and Hydraulics42(13): 32–35.
26.
SaigusaKMoritaT (2015) Self-sensing control of piezoelectric positioning stage by detecting permittivity. Sensors and Actuators A: Physical226: 76–80.
27.
StefanskiFMinorowiczBPerssonJ, et al. (2017) Non-linear control of a hydraulic piezo-valve using a generalised Prandtl–Ishlinskii hysteresis model. Mechanical Systems and Signal Processing82: 412–431.
28.
XieY (2013) Improved self-sensing piezoelectric actuator for dither motor rate control. Journal of Intelligent Material Systems and Structures24(14): 1747–1753.
29.
YuJTJiaoZXWuS (2013) Design and simulation study on new servo valve direct driven by piezoelectric actuator using hydraulic amplification. Journal of Mechanical Engineering49(2): 151–158.
