Abstract
In this article, proposed is a hysteresis effects model of a bimorph circular flexural-mode piezoelectric actuator for a deformable mirror of adaptive optics system. The analytical solutions are derived from the three-dimensional equations of piezoelectricity, and the dependence of the nonlinear hysteresis performance of the actuator on the physical parameters is evaluated. Numerical results illustrate that the hysteresis loops of the strokes of the actuator are affected by the start values of the electric field and the thickness of the metallic layer. Besides, the results also suggest that an appropriate thickness of metallic layer could compensate some hysteresis effects. Moreover, the results of the analytical method have been demonstrated by those of the finite element method.
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