Frequency and time domain analysis of surface acoustic wave propagation on a piezoelectric gallium arsenide substrate: A computational insight

Abstract

A computational study of the electromechanical response of micro-structure engineered two port surface acoustic wave delay lines on gallium arsenide is presented. The influence on the results of geometrical, material, and mesh parameters is also discussed. Furthermore, experimental results are provided to validate the numerical study. The device consists of two interdigital transducers composed of 40, 80, and 120 pairs of electrodes, respectively, with a pitch $p_{\mathrm{idt}}=8\mu \mathrm{m}$ and distant $d_{\mathrm{idt}}=1502\mu \mathrm{m}$ . In particular, a microwave burst of surface acoustic waves propagating on gallium arsenide is fully characterized including multiple transit effects. These results are of major interest for understanding the dynamical behavior of complex systems such as surface acoustic wave–based sensors or energy harvesting devices at the nano and microscale.