Heuristic modeling and inverse compensation of hysteresis in piezoelectric actuators based on time series similarity

Abstract

Hysteresis behavior of piezoelectric actuators degrades the accuracy and performance of the micro or nano positioning stage. As a remedy to this problem, a hysteresis model and a compensator based on time series similarity are proposed in this article. To generate this dynamic hysteresis model, geometric and time scale similarity of output displacement time series of piezoelectric actuators are studied. Furthermore, to compensate for hysteresis behavior, an inverse model based on time series similarity and an inverse model–based feedforward compensator are proposed. This novel model–based compensator is validated against the Prandtl–Ishlinskii model–based one and is assessed for effectiveness and practicality.