This article proposes a new hybrid mount system with air springs and piezo-stack actuators that can deliver excellent performance in the microvibration control of high-tech facilities. Air springs are one of the most popular products for vibration isolation and deliver good performance in general. Piezo-stack actuators are capable of controlling micro- and nanolevel displacement with a fast response. In order to fully utilize the isolation and leveling performances of an air spring as a passive part, it is serially connected with a piezo-stack actuator serving as an active part. As a control logic for the hybrid mount, the filtered-X least-mean-square algorithm is applied. A hybrid mount system with four hybrid mounts is configured in order to confirm the performance of the hybrid mount and its performance is verified through a series of experimental tests.
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