Topology Optimized Design,Microfabrication and Characterization of Electro-Thermally Driven Microgripper

Abstract

This article presents a systematic and logical study of the topology optimized design, microfabrication, and static/dynamic performance characterization of an electro-thermo-mechanical microgripper. The microgripper is designed using a topology optimization algorithm based on a spatial filtering technique and considering different penalization coefficients for different material properties during the optimization cycle. The microgripper design has a symmetric monolithic 2D structure which consists of a complex combination of rigid links integrating both the actuating and gripping mechanisms. The numerical simulation is performed by studying the effects of convective heat transfer, thermal boundary conditions at the fixed anchors, and microgripper performance considering temperature-dependent and independent material properties. The microgripper is fabricated from a 25 μm thick nickel foil using laser microfabrication technology and its static/dynamic performance is experimentally evaluated. The static and dynamic electro-mechanical characteristics are analyzed as step response functions with respect to tweezing/actuating displacements, applied current/power, and actual electric resistance. A microgripper prototype having overall dimensions of 1 mm (L) × 2.5mm (W) is able to deliver the maximum tweezing and actuating displacements of 25.5 μm and 33.2 μm along X and Y axes, respectively, under an applied power of 2.32 W. Experimental performance is compared with finite element modeling simulation results.

Keywords

micro-electro-mechanical systems microgripper topology optimization laser microfabrication performance characterization finite element modeling.

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References

Allen, M. , Raulli, M. , Maute, K. and Frangopol, D.M. 2004. ``Reliability-Based Analysis and Design Optimization of Electrostatically Actuated MEMS,'' Computers and Structures , 82:1007-1020.

Ananthasuresh, G.K. 2003. Optimal Synthesis Methods for MEMS, Kluwer Academic Publishers, Boston.

Beaton, C.F. and Hewitt, G.F. 1988. Physical Property Data for the Design Engineer , Hemisphere Publishing Corporation, USA

Bendsøe, M.P. and Sigmund, O. 2003. Topology Optimization: Theory, Methods and Applications , Springer, Berlin.

Bordatchev, E.V. and Nikumb, S.K. 2005. ``Electro-thermally Driven Microgrippers for Micro-Electro-Mechanical Systems Applications,'' Journal of Microlithography, Microfabrication and Microsystems, 4(2):23011-1-7.

Cardoso, E.L. and Fonseca, J.S.O. 2003. ``Complexity Control in the Topology Optimization of Continuum Structures,'' Journal of the Brazilian Society of Mechanical Sciences and Engineering, 25(3):293-301.

Choi, H.S. , Lee, D.C. , Kim, S.S. and Han, C.S. 2005. ``The Development of a Microgripper with a Perturbation-Based Configuration Design Method,'' Journal of Micromechanics and Microengineering, 15(6):1327-1333.

Goldfarb, M. and Celanovic, N. 1999. ``A Flexure-Based Gripper for Small-Scale Manipulation ,'' Robotica, 17(2):181-188.

Haftka, R.T. , Gurdal, Z. and Kamat, M.P. 1990. Element of Structural Optimization, Kluwer Academic Publishers, Dordrecht; Boston.

10.

Kim, C. , Wang, S. , Hwang, I. and Lee, J. 2005. ``Parallel Computed Reliability-Based Topology Optimization Using Response Surface Method,'' In: Proceedings of 6th World Congress of Structural and Multidisciplinary Optimization , Rio de Janeiro, Brazil.

11.

Kim, D.H. , Kim, B. and Kang, H. 2004. ``Development of a Piezoelectric Polymer-Based Sensorized Microgripper for Microassembly and Micromanipulation, '' Microsystems Technologies-Micro-and Nanosystems-Information Storage and Processing Systems , 10(4):275-280.

12.

Kohl, M. , Just, E. , Pfleging, W. and Miyazaki, S. 2000. ``SMA Microgripper with Integrated Antagonism, '' Sensors and Actuators A-Physical, 83(1-3):208-213.

13.

Lai, Y. , Bordatchev, E.V. , Nikumb, S.K. and Hsu, W. 2006. ``Performance Characterization of In-Plane Electro-Thermally Driven Linear Microactuators,'' Journal of Intelligent Material Systems and Structures, 17(10):919-929.

14.

Lee, S. , Lee, K. and Lee, S. 2002. ``Fabrication of an Electrothermally Actuated Electrostatic Microgripper,'' International Journal of Nonlinear Science and Numeric Simulations, 3:789-793.

15.

Luo, J. , He, J.H. , Flewitt, A. , Moore, D.F. , Spearing, S.M. , Fleck, N.A. and Milne, W.I. 2005. ``Development of all Metal Electrothermal Actuator and its Applications,'' Journal of Microlithography, Microfabrication and Microsystems, 4(2):23012-1-10.

16.

Mankame, N.D. and Ananthasuresh, G.K. 2001. ``Comprehensive Thermal Modeling and Characterization of an Electro-Thermal-Compliant Microactuator , '' Journal of Micromechanics and Microengineering, 11:452-462.

17.

Maute, K. and Frangopol, D.M. 2003. ``Reliability-Based Design of MEMS Mechanisms by Topology Optimization,'' Computers and Structures, 81(8):813-824.

18.

Menciassi, A. , Eisinberg, A. , Izzo, I. and Dario, P. 2004. ``From `Macro' to `Micro' Manipulation: Models and Experiments ,'' IEEE-ASME Transactions on Mechatronics , 9(2):311-320.

19.

Millet, O. , Bernardoni, P. , Regnier, S. , Bidaut, P. , Tsitsiris, E. , Collard, D. and Buchaillot, L. 2004. ``Electrostatic Actuated Micro Gripper Using an Amplification Mechanism,'' Sensors and Actuators A-Physical , 114:371-378.

20.

Nguyen, N.T. , Ho, S.S. and Low, C.L.-N. 2004. ``A Polymeric Microgripper with Integrated Thermal Actuators,'' Journal of Micromechanics and Microengineering, 14(7):969-974.

21.

Perez, R. , Agnus, J. , Clevy, C. , Hubert, A. and Chaillet, N. 2005. ``Modeling, Fabrication, and Validation of a High-Performance 2-DoF Piezoactuator for Micromanipulation,'' IEEE-ASME Transactions on Mechatronics, 10(2):161-171.

22.

Raulli, M. and Maute, K. 2005. ``Topology Optimization of Electrostatically Actuated Microsystems,'' Structural and Multidisciplinary Optimization , 30:342-359

23.

Roch, I. , Bidaud, P. , Collard, D. and Buchaillot, L. 2003. ``Fabrication and Characterization of an SU-8 Gripper Actuated by a Shape Memory Alloy Thin Film,'' Journal of Micromechanics and Microengineering, 13(2):330-336.

24.

Rubio, W.M. 2005. ``Electrothermomechanical MEMS Design based on Topology Optimization Method,'' Master Thesis, Escola Politecnica da Universidade de Sao Paulo.

25.

Sigmund, O. 2001a. ``Design of Multiphysics Actuators Using Topology Optimization - Part I: One-Material Structures,'' Computer Methods in Applied Mechanics and Engineering, 190(49):6577-6604.

26.

Sigmund, O. 2001b. ``Design of Multiphysics Actuators Using Topology Optimization - Part II: Two-Material Structures,'' Computer Methods in Applied Mechanics and Engineering, 190(49):6605-6627.

27.

Volland, B.E. , Heerlein, H. and Rangelow, I.W. 2002. ``Electrostatically Driven Microgripper,'' Microelectronic Engineering, 61-62:1015-1023.

28.

Wierzbicki, R. , Houston, K. , Heerlein, H. , Barth, W. , Debski, T. , Eisinberg, A. , Menciassi, A. , Carrozza, M.C. and Dario, P. 2006. ``Design and Fabrication of an Electrostatically Driven Microgripper for Blood Vessel Manipulation,'' Microelectronic Engineering, 83:1651-1654.

29.

Zeman, M. , Bordatchev, E. and Knopf, G. 2006. ``Design, Kinematic Modeling and Performance Testing of an ElectroThermally Driven Microgripper for Micromanipulation Applications ,'' Journal of Micromechanics and Microengineering, 16(8):1540-1549.