A miniature ultrasonic motor using first-order bending vibration of a cylinder with two free-free ends has been developed in this investigation. It is based on Pb(Mg1/3Nb2/3) O3-PbTiO3 crystal with high piezoelectric response. The stator of the motor is optimized by finite element method. The stator is 4.8 mm in diameter and 18 mm in length. The nonlinear characteristics of the stator are discussed in this study and a fitted formula is given. The resonant frequency and mechanical quality factor of the stator decrease with voltage. The main performance of the motor is measured. The rotation speed reaches 450 r/m, with a maximal torque of 0.6 mNm. The motor can run with low voltage.
Dong, S., Wang, S., Sen, W. and Li, L.2000. ``A Miniature Piezoelectric Ultrasonic Motor Based on Circular Bending Vibration Mode''IEEETrans. Ultrason., Ferroelect., Freq. Control, 5(4):325.
3.
Dong, S., Yan, L., Wang, N. and Viehland, D.2005. ``A Small, Linear, Piezoelectric Ultrasonic Cryomotor ,'' Appl. Phys. Lett., 86:053501.
4.
Koc, B., Cagatay, S. and Uchino, K.2002. ``A Piezoelectric Motor Using Two Orthogonal Bending Modes of a Hollow Cylinder,''IEEE Trans. Ultrason., Ferroelect., Freq. Control, 49(4):495.
5.
Kurasawa, M., Nakamura, K., Okamoto, T. and Ueha, S.1989. ``An Ultrasonic Motor using Bending Vibrations of a Short Cylinder,''IEEE Trans. Ultrason., Ferroelect., Freq. Control , 36(5):517.
6.
Lu, P., Lee, K.H., Lim, S.P. and Lin, W.Z.2001. ``A Kinematic Analysis of Cylindrical Ultrasonic Micromotors,'' Sensor. Actuat. A Phys., 87:194.
7.
Luo, L., Wang, H., Tang, Y., Zhao, X., Feng, Z., Lin, D. and Luo, H.2006. ``Ultrahigh Transverse Stain and Piezoelectric Behavior in (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3,'' J. Appl. Phys. , 99:024104.
8.
Luo, L., Zhu, H., Zhao, C., Wang, H. and Luo, H.2007. ``Cylindershaped Ultrasonic Motors 4.8mm in Diameter using Electroactive Piezoelectric Materials,'' Appl. Phys. Lett. , 90:052904.
9.
Morita, T. and Kurosawa, M.1998. ``A Cylindrical Micro Ultrasonic Motor using PZT Thin Film Deposited by Single Process Hydrothermal Method,''IEEE Trans. Ultrason., Ferroelect., Freq. Control, 45(5):1178.
10.
Park, D.-S., Park, S.-E. and Shrout, T.R.1999. ``Dielectric and Piezoelectric Properties of Perovskite Materials at Cryogenic Temperatures,''J. Mater. Sci., 34:469-473.
11.
Park, S.-E. and Shrout, T.R.1997. ``Ultrahigh Strain and Piezoelectric Behavior in Relaxor Based Ferroelectric Single Crystals,''J. Appl. Phys. , 82:1804.
12.
Priya, S., Viehland, D., Carazo, A.V., Ryu, J. and Uchino, K.2001. ``High-power Resonant Measurements of Piezoelectric Materials: Important of Elastic Nonlinearities,''J. Appl. Phy., 90:1469.
13.
Sashida, T. and Kenjo, T.1993. An Introduction to Ultrasonic Motors, Oxford Science Publica, New York.
14.
Uchino, K.1997. Piezoelectric Actuators and Ultrasonic Motors, Kluwer Academic, Boston.
15.
Zhen, T., Dong, Y. and Zhao, C.2004. ``Research on Optimum Place of Piezoelectric Ceramic Plate in Rod-type Ul Transonic Motor,'' Piezoelectrics & Acoustooptics , 26:20.
