Quantitative Evaluation of CVD Diamond Coating Layer Using Rayleigh-like Waves

Abstract

This work aims to explore the possibility of using generalized Lamb waves for nondestructive evaluation of the bonding quality of layered substrates. For this purpose, CVD diamond specimens with different cleaning conditions are prepared. A dispersion simulation performed for layered substrates with imperfect interfaces is carried out to find out the characteristics of dispersion curves that can be used for bonding quality evaluation. Then the characteristics of dispersion curves of the fabricated specimens are experimentally determined by using an ultrasonic backward radiation measurement technique. The results obtained in the present study show that the lowest velocity mode (Rayleigh-like) of the generalized Lamb waves is sensitively affected by the bonding quality. Therefore, the Rayleigh-like Lamb waves can be applied for nondestructive evaluation of imperfect bonding quality in various layered substrates.

Keywords

Rayleigh-like waves bonding quality CVD diamond coating ultrasonic backward radiation.

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