Abstract
This article presents an eddy current damper of a passive reaction force compensation mechanism for a linear motor motion stage. The reaction force compensation mechanism with a movable magnet track and eddy current damper resolves problems with the existing spring-based reaction force compensation mechanism such as resonance, design freedom, and difficulty of assembly and manufacturing. A simplified mathematical model of the eddy current damper is derived considering the sinusoidal magnetic flux density distribution and effective width of the eddy current damper, which shows important design factors of the eddy current damper–based reaction force compensation mechanism. Then, force of the eddy current damper according to the constant speed motion of the magnet track is investigated using multi-physical finite element analysis and is verified by experiments. Finally, the passive reaction force compensation with movable magnet track and eddy current damper is identified by experiments, and the finite element analysis of the eddy current damper is verified with free and forced vibration responses.
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