The article covers structural design and disturbance rejection control of a flexure-based compliant piezoelectric nanopositioning stage. The stage is devised using four-bar amplification mechanisms, auxiliary guiding mechanisms, and a compound parallelogram mechanism. Static and dynamic models of compliant mechanisms are analyzed based on a compliance matrix method. A modified Prandtl-Ishlinskii (PI) model with dead zone operators is used to describe the asymmetric hysteresis. Then, a global electromechanical dynamic model is built and identified. A comprehensive disturbance rejection controller (CDRC) combining a robust H∞ control and a disturbance observer-based (DOB) control is proposed for high trajectory tracking accuracy and anti-disturbance performance. The trajectory tracking accuracy of the stage can be up to 3 nm in experiments. As amplitudes of reference signals increases, relative tracking errors gradually decrease. System instability and oscillation caused by strong external disturbances are also reduced. Experimental results prove the effectiveness of the developed CDRC.
NieLLuoYGaoW, et al. Rate-dependent asymmetric hysteresis modeling and robust adaptive trajectory tracking for piezoelectric micropositioning stages. Nonlinear Dyn2022; 108: 2023–2043.
2.
LingMZhangCChenL. Optimized design of a compact multi-stage displacement amplification mechanism with enhanced efficiency. Precis Eng2022; 77: 77–89.
3.
LiuRWenZCaoT, et al. A precision positioning rotary stage driven by multilayer piezoelectric stacks. Precis Eng2022; 76: 226–236.
4.
Mohand-OusaidAHaliyoSRegnierS, et al. High fidelity force feedback facilitates manual injection in biological samples. IEEE Robot Autom Lett2020; 5: 1758–1763.
5.
AvciEOharaKNghiemCN, et al. High-speed automated manipulation of microobjects using a two-fingered micro-hand. IEEE Trans Ind Electron2015; 62: 1070–1079.
6.
LeeHJWooSParkJ, et al. Compact compliant parallel XY nano-positioning stage with high dynamic performance, small crosstalk, and small yaw motion. Microsyst Technol2018; 24: 2653–2662.
7.
CaiKTianYLiuX, et al. Development and control methodologies for 2-DOF micro/nano positioning stage with high out-of-plane payload capacity. Robot Comput Integr Manuf2019; 56: 95–105.
8.
TangHLiJJiaY, et al. Development and testing of a large-stroke nanopositioning stage with linear active disturbance rejection controller. IEEE Trans Autom Sci Eng2021; 19: 2461–2470.
9.
ShiBShiRWangF. Design of an adaptive feedforward/feedback combined control for piezoelectric actuated micro positioning stage. Precis Eng2022; 78: 199–205.
10.
WangPXuQ. Design and testing of a flexure-based constant-force stage for biological cell micromanipulation. IEEE Trans Autom Sci Eng2018; 15: 1114–1126.
11.
XiaoRShaoSXuM, et al. Design and analysis of a novel piezo-actuated XYθz micropositioning mechanism with large travel and kinematic decoupling. Adv Mater Sci Eng2019; 5461725.
12.
QuJChenWZhangJ, et al. A piezo-driven 2-DOF compliant micropositioning stage with remote center of motion. Sens Actuator A Phys2016; 239: 114–126.
13.
WangFHuoZLiangC, et al. A novel actuator-internal micro/nano positioning stage with an arch-shape bridge type amplifier. IEEE Trans Ind Electron2019; 66: 9161–9172.
14.
LeeCLeeJWRyuSG, et al. Optimum design of a large area, flexure based XYθ mask alignment stage for a 12-inch wafer using grey relation analysis. Robot Comput Integr Manuf2019; 58: 109–119.
15.
ZhangXXuQ. Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage. Robot Comput Integr Manuf2018; 54: 162–172.
16.
Al-JodahAShirinzadehBGhafarianM, et al. Design, modeling, and control of a large range 3-DOF micropositioning stage. Mech Mach Theory2021; 156: 104159.
17.
ZhangXXuQ. Design and testing of a new 3-DOF spatial flexure parallel micropositioning stage. Int J Precis Eng Manuf2018; 19: 109–118.
18.
YuHZhangCYangB, et al. The design and kinetostatic modeling of 3PPR planar compliant parallel mechanism based on compliance matrix method. Rev Sci Instrum2019; 90: 045102.
19.
Al-JodahAShirinzadehBGhafarianM, et al. Development and control of a large range XYΘ micropositioning stage. Mechatronics2020; 66: 102343.
20.
WangTLiYZhangY, et al. Design of a flexure-based parallel XY micropositioning stage with millimeter workspace and high bandwidth. Sens Actuator A Phys2021; 331: 112899.
21.
WuZYXuQS. Design, optimization and testing of a compact XY parallel nanopositioning stage with stacked structure. Mech Mach Theory2018; 126: 171–188.
22.
RizaMHaoG. A flexure motion stage system for light beam control. Microsyst Technol2018; 25: 3185–3191.
23.
Al-JodahAShirinzadehBGhafarianM, et al. Modeling and a cross-coupling compensation control methodology of a large range 3-DOF micropositioner with low parasitic motions. Mech Mach Theory2021; 162: 104334.
24.
WangWZhangJXuM, et al. Hysteresis characteristics and MPI compensation of two-dimensional piezoelectric positioning stage. Micromachines2022; 13: 321.
25.
Al JanaidehMRakotondrabeM. Precision motion control of a piezoelectric cantilever positioning system with rate-dependent hysteresis nonlinearities. Nonlinear Dyn2021; 104: 3385–3405.
26.
LiYXuQ. A totally decoupled piezo-driven XYZ flexure parallel micropositioning stage for micro/nanomanipulation. IEEE Trans Autom Sci Eng2011; 8: 265–279.
27.
FangJWangJLiC, et al. A compound control based on the piezo-actuated stage with Bouc–Wen model. Micromachines2019; 10: 861.
28.
RakotondrabeM. Bouc–Wen modeling and inverse multiplicative structure to compensate hysteresis nonlinearity in piezoelectric actuators. IEEE Trans Autom Sci Eng2010; 8: 428–431.
29.
FangJZhongWLiC, et al. Fuzzy adaptive multi-mode sliding mode control for precision linear stage based on floating stator. Rev Sci Instrum2019; 90: 015103.
30.
WangFLiangCTianY, et al. Design and control of a compliant microgripper with a large amplification ratio for high-speed micro manipulation. IEEE ASME Trans Mechatron2016; 21: 1262–1271.
31.
Al-JodahAALShirinzadehBPinskierJ, et al. Antlion optimized robust control approach for micropositioning trajectory tracking tasks. IEEE Access2020; 8: 220889–220907.
32.
LiuPYanPZhangZ, et al. Modeling and control of a novel XY parallel piezoelectric-actuator driven nanopositioner. ISA Trans2015; 56: 145–154.
33.
AhmadIAliMAKoW. Robust µ-synthesis with Dahl model based feedforward compensator design for piezo-actuated micropositioning stage. IEEE Access2020; 8: 141799–141813.
34.
LiuPYanPÖzbayH. Design and trajectory tracking control of a piezoelectric nano-manipulator with actuator saturations. Mech Syst Signal Process2018; 111: 529–544.
35.
ZhouRZhuZHKongL, et al. Development of a high-performance force sensing fast tool servo. IEEE Trans Industr Inform2022; 18: 35–45.
36.
YangCWangYYoucef-ToumiK. Hierarchical antidisturbance control of a piezoelectric stage via combined disturbance observer and error-based ADRC. IEEE Trans Ind Electron2022; 69: 5060–5070.
37.
FangJZhaoJZhangL, et al. Fuzzy sliding mode control of piezo-driven stage. Rev Sci Instrum2022; 93: 015011.
38.
JooYParkGBackJ, et al. Embedding internal model in disturbance observer with robust stability. IEEE Trans Automat Contr2016; 61: 3128–3133.
39.
ZhuZChenLHuangP, et al. Design and control of a piezoelectrically actuated fast tool servo for diamond turning of micro-structured surfaces. IEEE Trans Ind Electron2020; 67: 6688–6697.
40.
ZhuZToSEhmannKF, et al. Design, analysis, and realization of a novel piezoelectrically actuated rotary spatial vibration system for micro-/nanomachining. IEEE ASME Trans Mechatron2017; 22: 1227–1237.
41.
ZhuWLZhuZShiY, et al. A novel piezoelectrically actuated 2-DoF compliant micro/nano-positioning stage with multi-level amplification. Rev Sci Instrum2016; 87: 105006.
42.
YangYLWeiYDLouJQ, et al. Design and analysis of a new flexure-based XY stage. J Intell Mater Syst Struct2017; 28: 2388–2402.
43.
YangYLWuGHWeiYD. Design, modeling, and control of a monolithic compliant x-y-θ microstage using a double-rocker mechanism. Precis Eng2021; 71: 209–231.
44.
JianYHuangDLiuJ, et al. High-precision tracking of piezoelectric actuator using iterative learning control and direct inverse compensation of hysteresis. IEEE Trans Ind Electron2018; 66: 368–377.
45.
GuGYZhuLMSuCY, et al. Motion control of piezoelectric positioning stages: modeling, controller design, and experimental evaluation. IEEE ASME Trans Mechatron2013; 18: 1459–1471.
46.
Al JanaidehMRakotondrabeMAljanaidehO. Further results on hysteresis compensation of smart micropositioning systems with the inverse Prandtl–Ishlinskii compensator. IEEE Trans Control Syst Technol2016; 24: 428–439.
47.
ZhangSZhaoHMaX, et al. A 3-DOF piezoelectric micromanipulator based on symmetric and antisymmetric bending of a cross-shaped beam. IEEE Trans Ind Electron2022: 1–11.
48.
YangCXiaFWangY, et al. Comprehensive study of charge-based motion control for piezoelectric nanopositioners: modeling, instrumentation and controller design. Mech Syst Signal Process2022; 166: 108477.
49.
LouJQWeiYDYangYL, et al. Hybrid PD and effective multi-mode positive position feedback control for slewing and vibration suppression of a smart flexible manipulator. Smart Mater Struct2015; 24: 035007.
50.
SivriogluSBolatFCErturkE. Active vibration control of a blade element with uncertainty modeling in PZT actuator force. J Vib Control2019; 25: 2721–2732.
51.
WangRZhangX. Parameters optimization and experiment of a planar parallel 3-DOF nanopositioning system. IEEE Trans Ind Electron2018; 65: 2388–2397.
