This paper presents the input coupling modeling method for a three-PRR flexure-based compliant stage. The input coupling modeling for planar compliant mechanisms is first established. The kinematic structure of a three-PRR compliant stage is then designed, and its input coupling is derived by using the proposed method. Subsequently, the validation and analysis are carried out by using finite element method (FEM). The relationships between two main parameters and the input coupling rate of the three-PRR compliant stage are discussed, and the decoupling region is then determined. Finally, its geometrical parameters are optimized, and the workspace calculated by the analytical method is compared with that obtained from FEM. It not only provides a new input coupling modeling method for flexure-based compliant mechanisms, but also provides a reference for the design of three-PRR mechanisms.
ZhangXXuQ.Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage. Rob Comput Integr Manuf2018; 54: 162–172.
GuoZTianTZhangD, et al. A novel stick-slip based linear actuator using bi-directional motion of micropositioner. Mech Syst Signal Process2019; 128: 37–49.
4.
YooKSHanSY.Topology optimum design of compliant mechanisms using modified ant colony optimization. J Mech Sci Technol2015; 29: 3321–3327.
5.
DsouzaRDNavinKPTheodoridisT, et al. Design, fabrication and testing of a 2 DOF compliant flexural microgripper. Microsyst Technol2018; 24: 3867–3883.
6.
ZhuXWenZChenG, et al. A decoupled flexure-based rotary micropositioning stage with compact size. Proc IMechE, Part C: J Mechanical Engineering Science2018; 232: 4167–4179.
7.
XuQ.Design and development of a compact flexure-based XY precision positioning system with centimeter range. IEEE Trans Ind Electron2013; 61: 893–903.
8.
CaiKTianYWangF, et al. Design and control of a 6-degree-of-freedom precision positioning system. Rob Comput Integr Manuf2017; 44: 77–96.
9.
ClarkLShirinzadehBTianY, et al. Development of a passive compliant mechanism for measurement of micro/nanoscale planar 3-DOF motions. IEEE-ASME Trans Mechatron2016; 21: 1222–1232.
10.
QuJChenWZhangJ, et al. A piezo-driven 2-DOF compliant micropositioning stage with remote center of motion. Sens Actuator A-Phys2016; 239: 114–126.
11.
KurniawanRKoTJLiCP, et al. Development of a two-frequency, elliptical-vibration texturing device for surface texturing. J Mech Sci Technol2017; 31: 3465–3473.
12.
YuJXieYLiZ, et al. Design and experimental testing of an improved large-range decoupled XY compliant parallel micromanipulator. J Mech Robot2015; 7: 1–6.
13.
HaoG.Towards the design of monolithic decoupled XYZ compliant parallel mechanisms for multi-function applications. Mech Sci2013; 4: 291–302.
WanSZhangYXuQ.Design and development of a new large-stroke XY compliant micropositioning stage. Proc IMechE, Part C: J Mechanical Engineering Science2017; 231: 3263–3276.
16.
LiangCWangFShiB, et al. Design and control of a novel asymmetrical piezoelectric actuated microgripper for micromanipulation. Sens Actuator A Phys2018; 269: 227–237.
17.
TumaTHaeberleWRothuizenH, et al. Dual-stage nanopositioning for high-speed scanning probe microscopy. IEEE-ASME Trans Mechatron2013; 19: 1035–1045.
18.
DasTKShirinzadehBAl-JodahA, et al. A novel compliant piezoelectric actuated symmetric microgripper for the parasitic motion compensation. Mech Mach Theory2021; 155: 104069.
19.
KimHGweonDG.Development of a compact and long range XYθz nano-positioning stage. Rev Sci Instrum2012; 83: 085102.
20.
ZhangXHouW.Dynamic analysis of the precision compliant mechanisms considering thermal effect. Precis Eng2010; 34: 592–606.
21.
KimHYAhnDHGweonDG, et al. Development of a novel 3-degrees of freedom flexure based positioning system. Rev Sci Instrum2012; 83: 055114.
22.
QinYShirinzadehBZhangD, et al. Design and kinematics modeling of a novel 3-DOF monolithic manipulator featuring improved Scott-Russell mechanisms. J Mech Des2013; 135: 101004.
23.
QinYZhaoX.A novel method for measuring the coupled linear and angular motions of XYΘ-type flexure-based manipulators. In: IEEE international conference on robotics and automation, Seattle, WA, 26–30 May 2015, pp. 2722–2727. New York, NY: IEEE.
24.
AcerMŞabanoviçA.Design, kinematic modeling and sliding mode control with sliding mode observer of a novel 3-PRR compliant mechanism. Adv Rob2016; 30: 1228–1242.
25.
YangMZhangCYangG, et al. Optimal design and tracking control of a super-elastic flexure hinge based 3-PRR compliant parallel manipulator. IEEE Access2016; 7: 174236–174247.
26.
WangHZhangX.Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage. Mech Mach Theory2008; 43: 400–410.
27.
LiHLiuYWangZ, et al. A constraint-flow based method of synthesizing XYθ compliant parallel mechanisms with decoupled motion and actuation characteristics. Mech Mach Theory2022; 178: 105085.
