Ultra-precision diamond milling (UPDM) is one of ultra-precision machining approaches, providing nanometric surface roughness (NSR). The NSR exhibits rich anisotropic features, which is very sensitive to noise. However, there is lack of effective assessment of the anisotropic NSR. Therefore, the study proposed surface difference and surface curvatures as extra parameters to estimate the anisotropic NSR of UPDM. Moreover, noise effects were reduced by probability distribution with the 95–99 rule. Significantly, the proposed method effectively represents the anisotropic assessment of the NSR of UPDM.
DongZZhangSXiongZ.Surface integrity under diamond tool wear effects in ultra-precision raster milling of a Zn–Al–Cu alloy. Proc IMechE, Part C: J Mechanical Engineering Science2019; 233: 1111–1118.
2.
YuanJLyuBHangW, et al. Review on the progress of ultra-precision machining technologies. Front Mech Eng2017; 12: 158–180.
3.
ZhangSJToSWangSJ, et al. A review of surface roughness generation in ultra-precision machining. Int J Mach Tools Manuf2015; 91: 76–95.
4.
ZhangSGuoPXiongZ, et al. Cyclic shear angle for lamellar chip formation in ultra-precision machining. Proc IMechE, Part C: J Mechanical Engineering Science2020; 234: 2673–2680.
5.
ZhangGToSZhangS.Relationships of tool wear characteristics to cutting mechanics, chip formation, and surface quality in ultra-precision fly cutting. Int J Adv Manuf Technol2016; 83: 133–144.
6.
ZhangSJToSZhangGQ.Diamond tool wear in ultra-precision machining. Int J Adv Manuf Technol2017; 88: 613–629.
7.
WangSJToSCheungCF.An investigation into material-induced surface roughness in ultra-precision milling. Int J Adv Manuf Technol2013; 68: 607–616.
8.
KarBCPandaAKumarR, et al. Research trends in high speed milling of metal alloys: a short review. Mater Today Proc2020; 26: 2657–2662.
9.
GuptaKGuptaMK.Developments in nonconventional machining for sustainable production: a state-of-the-art review. Proc IMechE, Part C: J Mechanical Engineering Science2019; 233: 4213–4232.
10.
WeiWLiJChenY, et al. Analysis of characteristics of arc shape caused by intermittent cutting force and dynamic vibration in ultra-precision cutting processes. Proc IMechE. Part B: J Engineering Manufacture2020; 234: 1742–1751.
11.
ZhangSJToS.Spindle vibration influencing form error in ultra-precision diamond machining. Proc IMechE, Part C: J Mechanical Engineering Science2017; 231: 3144–3151.
12.
GaoQLuLChenW, et al. Influence of air-induced vibration of aerostatic bearing on the machined surface quality in ultra-precision flycutting. Proc IMechE Part C: J Mechanical Engineering Science2018; 232: 117–125.
13.
WhitehouseDJ.Handbook of surface and nanometrology. Boca Raton, FL: CRC Press, 2011.
14.
JiangXJWhitehouseDJ.Technological shifts in surface metrology. CIRP Ann Manuf Technol2012; 61: 815–836.
15.
ChenMPangQWangJ, et al. Analysis of 3D microtopography in machined KDP crystal surfaces based on fractal and wavelet methods. Int J Mach Tools Manuf2008; 48: 905–913.
16.
WangMWangWLuZ.Anisotropy of machined surfaces involved in the ultra-precision turning of single-crystal silicon—a simulation and experimental study. Int J Adv Manuf Technol2012; 60: 473–485.
17.
ChenQWangYZhouJ, et al. Research on characterization of anisotropic and isotropic processing surfaces by characteristic roughness. J Mater Process Technol2020; 275: 116277.
18.
EiflerMGarretsonICLinkeBS, et al. Effects of vibratory finishing of 304 stainless steel samples on areal roughness parameters: a correlational analysis for anisotropy parameters. J Mater Process Technol2019; 273: 116256.
19.
ZhangSJToSWangSJ, et al. A new representation with probability distribution for nanometric surface roughness in ultra-precision machining. Precis Eng2016; 45: 445–449.
20.
ISO 25178-2.Geometrical product specification-surface texture: areal-terms, definitions and surface texture parameters. Geneva, Switzerland: ISO, 2012.
