Restricted accessResearch articleFirst published online 1995-09
Toxicological Investigations in the Semiconductor Industry: IV: Studies On the Subchronic Oral Toxicity and Genotoxicity of Vacuum Pump Oils Contaminated By Waste Products From Aluminum Plasma Etching Processes
Dry etching processes in semiconductor manufacturing use ionized gases in closed reactors at pressures below 1 torr. Vacuum pump systems that service the reaction chambers are potential sources of exposure to complex mixtures of
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