This study was undertaken to measure the displacement field accurately by application of digital image correlation (DIC) to scanning electron microscopy (SEM) images. First, a method of removing the noise and drift that arise in SEM images is proposed. Second, a compact slide machine is fabricated. Third, a translation test is performed under optical microscopy and SEM using the slide machine. Then a displacement field calculation is performed using the proposed image analysis method. The results show that the proposed method is adequate for the application of DIC to SEM images.
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