Mo10W billets are fabricated via vacuum sintering (VS), hot pressing (HP), and VS + HP process. The results show that the Mo10W prepared by VS has good uniformity, even when the sintering temperature is as low as 1600 °C. However, the relative density of this alloy is only 95.37% when the sintering temperature is increased to 1900 °C. A high sintering temperature coarsens the grains. The relative density of HP-based Mo10W reaches 99.05% after sintering at 1500 °C, but its distributions of Mo and W are uneven. The Mo and W distributions of the VS + HP Mo10W alloy are uniform and its relative density reaches 98.1%. This work provides a new method for simultaneously improving the uniformity and density characteristics of Mo alloys.
Hofer-RoblyekAMPichlerKHLinkeC, et al.Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films. Surf Coat Technol2018; 352: 354–359.
2.
ChelvanathanPShahahmadiSAArithF, et al.Effects of RF magnetron sputtering deposition process parameters on the properties of molybdenum thin films. Thin Solid Films2017; 638: 213–219.
3.
RauschaMSabagaAPichleraKH, et al.The sputter performance of an industrial-scale planar Mo-target over its lifetime: target erosion and film properties. Surf Coat Technol2020; 381: 125174.
4.
KimJLLeeCKKimMJ, et al.Role of MoTi diffusion barrier in amorphous indium-gallium-zinc-oxide thin-film transistors with a copper source/drain electrode. Thin Solid Films2021; 731: 138759.
5.
LiHWuXWangP, et al.Stability, deoxidation, and sintering characteristics of activated Mo–10% Nb solid-solution powders prepared by mechanical alloying. J Mater Res Technol2022; 18: 3373–3385.
6.
LiJFuZWeiL, et al.Characterization of Mo-6Ta alloy targets and its magnetron sputtering deposited thin film. Int J Refract Met H2022; 103: 105770.
7.
KramyninSP. Theoretical study of concentration and size dependencies of the properties of Mo–W alloy. Solid State Sci2022; 124: 106814.
8.
LiZDingPWangR, et al.First-principles investigation on the effects of alloying elements on Cu/Mo interface. Chem Phys Lett2023; 832: 140895.
9.
YiC-XZhangH-TWangS-K, et al.Comprehensive effect of grain size and original target morphology on sputtering behavior of magnetron sputtering target. Vacuum2023; 210: 111866.
10.
ZhuJLiuSLongD, et al.The evolution of texture and microstructure uniformity in tantalum sheets during asymmetric cross rolling. Mater Characterization2020; 168: 110586.
11.
ChenKMTsaiDALiaoHC. Investigation of Al-Cr alloy targets sintered by various powder metallurgy methods and their particle generation behaviors in sputtering process. J Alloys Compd2016; 663: 52–59.
12.
HuangLPanYZhangJ, et al.Densification, grain growth mechanism and mechanical properties of Mo10Nb refractory targets fabricated by SPS. Int J Refract Met H2021; 99: 105575.
13.
HuangLPanYZhangJ, et al.Temperature-dependent structural, thermal, and mechanical properties of Mo-10Nb joints prepared by SPS. J Mater Sci2022; 57: 5315–5333.
14.
LiuGZhangGJJiangF, et al.Nanostructured high-strength molybdenum alloys with unprecedented tensile ductility. Nat Mater2013; 12: 344–350.
15.
DongZChenSLiuS, et al.Low-temperature accelerated sintering of high-performance oxide dispersion strengthened ultrafine grained Mo alloy. J Alloys Compd2022; 903: 163982.
16.
LiSLHuPZuoYG, et al.Precise control of oxygen for titanium-zirconium-molybdenum alloy. Int J Refract Met H2022; 103: 105768.
17.
AnGSunJSunY,et al.Preparation and influencing factors of molybdenum targets and magnetron-sputter-deposited molybdenum thin films. Mater Sci Forum2018; 913: 853–861.
18.
GaoJLuYHouJ, et al.Comparison of Mo-10Nb alloy target materials prepared by different techniques. Key Eng Mater2017; 726: 316–320.
19.
KimSKwonTKimS, et al.Effect of nanopowder preparation method on the sintering behavior and microstructure of Mo–W alloy. Int J Refract Met H2024; 118: 106491.
20.
HuangLPanYZhangJ, et al.Remanufacturing of the waste refractory Mo–10Nb sputtering target by spark plasma sintering technology. Vacuum2022; 200: 111050.
21.
Ohser-WiedemannRMartinUMüllerA,et al.Spark plasma sintering of Mo–W powders prepared by mechanical alloying. J Alloy Compd2013; 560: 27–32.
22.
ChenXLiBWangT, et al.Strengthening mechanisms of Mo-La2O3 alloys processed by solid-solid doping and vacuum hot-pressing sintering. Vacuum2018; 152: 70–77.
23.
TianPFengYXiaM, et al.Hot-pressed sintering of W/Cu functionally graded materials prepared from copper-coated tungsten powders. Rare Metals2020; 39: 1229–1236.
24.
MadeiraSBuciumeanuMCarvalhoO,et al.Influence of sintering pressure on the microstructure and tribological properties of low temperature fast sintered hot-pressed Y-TZP. Ceram Int2019; 45: 5883–5893.
25.
YouJHongS-H. Densification mechanism and microstructure development of Fe-Ni alloys consolidated by field assisted sintering. J Alloys Compd2021; 884: 161102.
26.
GaoLMengTXuG, et al.Interfacial diffusion behavior and properties of hot-pressed Kovar/Cu composites. Mater Chem Phys2024; 315: 128957.
27.
SonYChungHBLeeS. A two-dimensional Monte Carlo model for pore densification in a bi-crystal via grain boundary diffusion: effect of diffusion rate, initial pore distance, temperature, boundary energy and number of pores. J Eur Ceram Soc2020; 40: 3158–3171.
28.
MazlanMRJamadonNHRajabiA, et al.Necking mechanism under various sintering process parameters – A review. J Mater Res Technol2023; 23: 2189–2201.
29.
HuangLZhangJPanY,et al.Spark plasma sintering of W-10Ti high-purity sputtering target: densification mechanism and microstructure evolution. Int J Refract Met Hard Mater2020; 92: 105313.
30.
ZhangGKangYWangM, et al.Atomic diffusion behavior and diffusion mechanism in Fe-Cu bimetal casting process studied by molecular dynamics simulation and experiment. Mater Res Express2020; 7: 096519.
31.
WangRJingS-QChenL, et al.The vacancy-mediated diffusion of transition metal solutes in tungsten: atomic Kinetic Monte Carlo simulations. J Nucl Mater2025; 603: 155394.
32.
YangKTaoXZengZ,et al.Effects of pressure on hydrogen diffusion behaviors in MgO. Phys Chem Chem Phys2023; 25: 19824–19833.
33.
DongBFuYZhanH,et al.Thermal and stress impacts on vacancy diffusion through atomistic simulations. International Journal of Mechanical Sciences2023; 240: 107944.
